公开(公告)号：EP3176142B1

公开(公告)日：2020-04-01

申请号：EP16175558.2

申请日：2016-06-21

Applicant: STMicroelectronics S.r.l.

Inventor： CIMMINO, Angela ,  SALZILLO, Giovanna ,  CASUSCELLI, Valeria ,  DI MATTEO, Andrea

IPC: C04B35/468 ,  C01G23/00 ,  C04B35/622 ,  C04B35/624 ,  C04B35/632 ,  C04B35/634 ,  H01L41/187 ,  H01L41/318

公开(公告)号：EP3176143A1

公开(公告)日：2017-06-07

申请号：EP16175560.8

申请日：2016-06-21

Applicant: STMicroelectronics S.r.l.

Inventor： CIMMINO, Angela ,  SALZILLO, Giovanna ,  DI MATTEO, Andrea ,  CASUSCELLI, Valeria

IPC: C04B35/468 ,  C04B35/622 ,  C04B35/624 ,  C04B35/632 ,  C04B35/634 ,  H01L41/187 ,  H01L41/318 ,  C01G23/00

CPC classification number: C04B35/4682 ,  C01G23/006 ,  C01G25/006 ,  C01G45/125 ,  C01P2004/82 ,  C04B35/62218 ,  C04B35/624 ,  C04B35/632 ,  C04B35/6325 ,  C04B35/634 ,  C04B2235/3208 ,  C04B2235/3244 ,  C04B2235/3251 ,  C04B2235/3262 ,  C04B2235/3293 ,  C04B2235/44 ,  C04B2235/441 ,  C04B2235/449 ,  C04B2235/765 ,  C04B2235/81 ,  H01L41/1871 ,  H01L41/318

Abstract: The present invention relates to a precursor solution for the preparation of a ceramic of the BZT-αBXT type, where X is selected from Ca, Sn, Mn and Nb, and α is a molar fraction selected in the range between 0.10 and 0.90, said solution comprising:
1) at least one anhydrous or dehydrated precursor compound of barium,
2) at least one anhydrous or dehydrated precursor compound selected from the group consisting of a calcium compound, a tin compound, a manganese compound, and a niobium compound,
3) at least one anhydrous precursor compound of zirconium,
4) at least one anhydrous precursor compound of titanium,
5) a solvent selected from the group consisting of polyols, alcohols, carboxylic acids, esters, ketones, ethers, and their mixtures,
6) a chelating agent.
The invention moreover relates to a method for the preparation of the precursor solution, to a piezoelectric material obtained from the precursor solution, to a method for the preparation of a film of the piezoelectric material, to a device comprising the piezoelectric material, and to the use of the piezoelectric material.

Abstract translation: 本发明涉及一种用于在BZT±BXT型，其中X是选自Ca，锡，锰和Nb中选择的陶瓷的制备前体溶液，和±是0:10和0.90之间的范围内选择的摩尔分数， 所述溶液包含：1）至少一种无水的或钡的脱水前体化合物，2）选自钙化合物，锡化合物，锰化合物和铌化合物的选择的至少一种无水的或脱水的前体化合物， 锆的3）至少一种无水的前体化合物，4）至少一种无水的前体的钛的化合物，5）选自多元醇，醇，羧酸，酯，酮，醚和它们的混合物，6中的溶剂 ）螯合剂。 本发明更以上涉及用于制备所述前体的溶液，以从该前体溶液获得，一种用于压电材料的薄膜的制备压电材料的方法，包含所述压电材料的装置，并以 使用压电材料的。

公开(公告)号：EP3176142A1

公开(公告)日：2017-06-07

申请号：EP16175558.2

申请日：2016-06-21

Applicant: STMicroelectronics S.r.l.

Inventor： CIMMINO, Angela ,  SALZILLO, Giovanna ,  CASUSCELLI, Valeria ,  DI MATTEO, Andrea

IPC: C04B35/468 ,  C01G23/00 ,  C04B35/622 ,  C04B35/624 ,  C04B35/632 ,  C04B35/634 ,  H01L41/187 ,  H01L41/318

Abstract: The present invention relates to a precursor solution for the preparation of a ceramic of the BZT-αBXT type, where X is selected from Ca, Sn, Mn, and Nb, and α is a molar fraction selected in the range between 0.10 and 0.90, said solution comprising:
1) at least one barium precursor compound;
2) a precursor compound selected from the group consisting of at least one calcium compound, at least one tin compound, at least one manganese compound, and at least one niobium compound;
3) at least one anhydrous precursor compound of zirconium;
4) at least one anhydrous precursor compound of titanium;
5) a solvent selected from the group consisting of a polyol and mixtures of a polyol and a secondary solvent selected from the group consisting of alcohols, carboxylic acids, esters, ketones, ethers, and their mixtures; and
6) a chelating agent.
The invention moreover relates to a method for the preparation of the precursor solution, to a piezoelectric material obtained from the precursor solution, to a method for the preparation of a film of the piezoelectric material, to a device comprising the piezoelectric material, and to the use of the piezoelectric material.

Abstract translation: 本发明涉及用于制备BZT-αBXT型陶瓷的前体溶液，其中X选自Ca，Sn，Mn和Nb，并且α是选自0.10至0.90范围内的摩尔分数， 所述溶液包含：1）至少一种钡前体化合物; 2）选自至少一种钙化合物，至少一种锡化合物，至少一种锰化合物和至少一种铌化合物的前体化合物; 3）至少一种锆的无水前体化合物; 4）至少一种钛的无水前体化合物; 5）选自多元醇和多元醇与选自醇，羧酸，酯，酮，醚及其混合物的第二溶剂的混合物的溶剂; 和6）螯合剂。 本发明还涉及用于制备前体溶液的方法，由前体溶液获得的压电材料，涉及用于制备压电材料膜的方法，包括该压电材料的器件以及涉及 使用压电材料。