公开(公告)号：EP2902358B1

公开(公告)日：2018-09-26

申请号：EP15153380.9

申请日：2015-01-30

Applicant: STMicroelectronics S.r.l.

Inventor： Carminati, Roberto ,  Conti, Sebastiano

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/0062 ,  B81B3/0043 ,  B81B7/008 ,  B81B2201/018 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B26/0841 ,  G03B21/142 ,  G03B21/2033 ,  G03B21/28

Abstract: The MEMS device has a suspended mass (31) supported via a pair of articulation arms (32) by a supporting region (33). An electrostatic driving system (36), coupled to the articulation arms (32), has mobile electrodes (38) and fixed electrodes (39) that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies (36), arranged on opposite sides of a respective articulation arm (32) and connected to the articulation arm through connection elements (30). Each actuation assembly (36) extends laterally to the suspended mass (31) and has an auxiliary arm (37) carrying a respective plurality of mobile electrodes (38). Each auxiliary arm is parallel to the articulation arms (32). The connection elements (30) may be rigid or formed by linkages.

公开(公告)号：EP2902358A1

公开(公告)日：2015-08-05

申请号：EP15153380.9

申请日：2015-01-30

Applicant: STMicroelectronics S.r.l.

Inventor： Carminati, Roberto ,  Conti, Sebastiano

IPC: B81B7/00 ,  G02B26/08

CPC classification number: B81B3/0062 ,  B81B3/0043 ,  B81B7/008 ,  B81B2201/018 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B26/0841 ,  G03B21/142 ,  G03B21/2033 ,  G03B21/28

Abstract: The MEMS device has a suspended mass (31) supported via a pair of articulation arms (32) by a supporting region (33). An electrostatic driving system (36), coupled to the articulation arms (32), has mobile electrodes (38) and fixed electrodes (39) that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies (36), arranged on opposite sides of a respective articulation arm (32) and connected to the articulation arm through connection elements (30). Each actuation assembly (36) extends laterally to the suspended mass (31) and has an auxiliary arm (37) carrying a respective plurality of mobile electrodes (38). Each auxiliary arm is parallel to the articulation arms (32). The connection elements (30) may be rigid or formed by linkages.

Abstract translation: MEMS器件具有经由支撑区域（33）经由一对关节臂（32）支撑的悬挂块（31）。 耦合到关节臂（32）的静电驱动系统（36）具有彼此耦合的移动电极（38）和固定电极（39）。 静电驱动系统由两对致动组件（36）形成，所述致动组件布置在相应的关节臂（32）的相对侧上，并通过连接元件（30）连接到关节臂。 每个致动组件（36）横向延伸到悬挂质量块（31），并且具有承载相应多个移动电极（38）的辅助臂（37）。 每个辅助臂平行于铰接臂（32）。 连接元件（30）可以是刚性的或通过连杆形成。