METHOD TO ESTIMATE PHASE AND AMPLITUDE FOR CONTROL OF A RESONANT MEMS MIRROR

    公开(公告)号:EP4215974A1

    公开(公告)日:2023-07-26

    申请号:EP23152162.6

    申请日:2023-01-18

    Abstract: Techniques to be described herein are based upon the combination of a digital lockin amplifier approach with a numerical method to yield accurate estimations of the amplitude (Asense) and phase (ϕsense) of a sense signal (Sns) obtained from a movement sensor (13) associated with a resonant MEMS device (11), such as a MEMS mirror.
    The techniques described herein are efficient from a computational point of view, in a manner which is suitable for applications in which the implementing hardware is to follow size and power consumption constraints.

    ENERGY RECOVERY DRIVER FOR PZT ACTUATORS
    2.
    发明公开

    公开(公告)号:EP4326038A1

    公开(公告)日:2024-02-21

    申请号:EP23188320.8

    申请日:2023-07-28

    Abstract: A differential piezoelectric actuator-system (10) includes an inductor (L) and driver-circuit (11, 12) having switches (S1-S6) for transferring energy between first and second actuators (PZT1, PZT2) and the inductor, and between a voltage-supply node (Vbatt) and the inductor. Control circuitry (21) determines whether a next phase in which to operate the driver-circuit is a first charging-phase or a first recovery-phase. The first charging-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the voltage supply node to the inductor; and a third sub-phase to transfer energy from the inductor to the second actuator. The first recovery-phase includes operating the switches in: a first sub-phase to transfer energy from the first actuator to the inductor; a second sub-phase to transfer energy from the inductor to the voltage supply node; and a third sub-phase to transfer energy from the inductor to the second actuator.

    RESISTIVE BRIDGE SENSOR WITH TEMPERATURE COMPENSATION

    公开(公告)号:EP3913345A1

    公开(公告)日:2021-11-24

    申请号:EP21171960.4

    申请日:2021-05-04

    Abstract: A bridge driver circuit (104) applies a bias voltage across first (142) and second (144) input nodes of a resistive bridge circuit (102) configured to measure a physical property such as pressure or movement. A sensing circuit (185) senses a bridge current (Ipbridge, Inbridge) that flows through the resistive bridge circuit (102) in response to the applied bias voltage. A temperature dependent sensitivity of the resistive bridge circuit (102) is determined by processing the sensed bridge current. A voltage output at first (146) and second (148) output nodes of the resistive bridge circuit (102) is processed to determine a value of the physical property. This processing further involves applying a temperature correction in response to the determined temperature dependent sensitivity.

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