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    Semiconductor integrated inertial sensor with calibration microactuator
    1.
    发明公开
    Semiconductor integrated inertial sensor with calibration microactuator 有权
    Integrierter Halbleiter-Inertialsensor mit Mikroantrieb zur Kalibration

    公开(公告)号：EP1083430A1

    公开(公告)日：2001-03-14

    申请号：EP99830566.8

    申请日：1999-09-10

    Applicant: STMicroelectronics S.r.l.

    Inventor： Zerbini, Sarah ,  Vigna, Benedetto ,  Garavaglia, Massimo ,  Tomesi, Gianluca

    IPC: G01P15/10 ,  G01P21/00 ,  G01P15/125

    CPC classification number: G01P21/00 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0814

    Abstract: The inertial sensor (1) comprises an inner stator (2) and an outer rotor (3) which are electrostatically coupled together by means of mobile sensor arms (5) and fixed sensor arms (9a, 9b). The rotor (3) is connected to a calibration microactuator (12) comprising four sets (27) of actuator elements (13) arranged one for each quadrant of the inertial sensor. There are two actuator elements (13) making up each set, which are identical to each other, are angularly equidistant, and each of which comprises a mobile actuator arm (15) connected to the rotor (3) and bearing a plurality of mobile actuator electrodes (16), and a pair of fixed actuator arms (17a, 17b) which are set on opposite sides with respect to the corresponding mobile actuator arm and bear a plurality of fixed actuator electrodes (19a, 19b). The mobile actuator electrodes (16) and fixed actuator electrodes (19a, 19b) are connected to a driving unit (20) which biases them so as to cause a preset motion of the rotor (3), the motion being detected by a sensing unit (24) connected to the fixed sensor arms (9a, 9b).

    Abstract translation: 惯性传感器（1）包括通过移动传感器臂（5）和固定传感器臂（9a，9b）静电耦合在一起的内部定子（2）和外部转子（3）。 转子（3）连接到校准微致动器（12），该校准微致动器（12）包括为惯性传感器的每个象限布置的一组致动器元件（13）的四组（27）。 构成彼此相同的每组的两个致动器元件（13）成角度等距，并且每个致动器元件（13）包括连接到转子（3）的移动致动器臂（15）并且承载多个移动致动器 电极（16）和一对固定致动器臂（17a，17b），其相对于相应的移动致动器臂设置在相对侧上并且承载多个固定致动器电极（19a，19b）。 移动致动器电极（16）和固定致动器电极（19a，19b）连接到驱动单元（20），该驱动单元（20）偏置它们，以使转子（3）发生预设的运动，运动由感测单元 （24）连接到固定传感器臂（9a，9b）。

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