CHARGE-BALANCE POWER DEVICE, AND PROCESS FOR MANUFACTURING THE CHARGE-BALANCE POWER DEVICE

    公开(公告)号:EP3772110A1

    公开(公告)日:2021-02-03

    申请号:EP20188653.8

    申请日:2020-07-30

    Abstract: A charge-balance power device (20; 50), comprising: a semiconductor body (22; 52) having a first conductivity type (N); a trench gate (28; 58) in the semiconductor body (22; 52); a body region (25; 55), having a second conductivity (P), which extends on a first side of the trench gate (28; 58); source regions (26; 56) in the body region (25; 55); and a drain terminal (21, 24; 51, 54) opposite to the source region, as the device is a vertical-channel device. The device further comprises a first and a second columnar region having the second conductivity (P), which extend in the semiconductor body (22; 52) adjacent to mutually opposite sides of the trench gate (28; 58), at a distance (d B , d S ) from both the body region (25; 55) and from the drain terminal (21, 24; 51, 54).

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