公开(公告)号：EP1146545A1

公开(公告)日：2001-10-17

申请号：EP00830268.9

申请日：2000-04-10

Applicant: STMicroelectronics S.r.l.

Inventor： Pocorobba, Concetto ,  Grasso, Gianleonardo

IPC: H01L21/00

CPC classification number: H01L21/687

Abstract: A silicon wafer supporting device, for the evaporation of the wafer backside, comprising a plate-like element (10); its particularity consists of the fact that it comprises at least one blind seat (11) which is formed at the lower surface of the plate-like element (10) and is adapted to accommodate at least one silicon wafer (2) whose lower side must be subjected to a metallization process, a plurality of bracket-like elements (12) being rigidly fixed to the plate-like element (10) and being adapted to support the at least one silicon wafer (2) at its perimeter.

Abstract translation: 一种硅晶片支撑装置，用于晶片背面的蒸发，包括板状元件（10）; 其特殊性在于它包括至少一个盲板座（11），其形成在板状元件（10）的下表面处，并且适于容纳至少一个硅晶片（2），其中下侧必须 经受金属化处理，多个支架状元件（12）刚性地固定到板状元件（10）上并且适于在其周边支撑至少一个硅晶片（2）。