公开(公告)号：EP3226059A1

公开(公告)日：2017-10-04

申请号：EP16194688.4

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： MERLI, Massimiliano ,  CARMINATI, Roberto ,  ROSSI, Marco

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0858 ,  G01L1/16 ,  G01L1/18 ,  G01L5/00 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105 ,  G06F3/0423 ,  H01L41/09 ,  H03H9/02275 ,  H04N5/225

Abstract: A MEMS device (40) has a platform (45) carried by a frame (48) via elastic connection elements (46) configured to enable rotation of the platform about a first axis (A). A bearing structure (41) supports the frame (48) through first and second elastic suspension arms configured to enable rotation of the frame (48) about a second axis (B), transverse to the first axis (A). The elastic suspension arms (49) are anchored to the bearing structure (41) through respective anchorage portions (50) arranged offset with respect to the second axis (B). A stress sensor (51, 52) is formed by a first and a second sensor element (51, 52), respectively arranged on the first and second suspension arms (49), in proximity of the anchorage portions, on a same side of the second axis (B), in a symmetrical position with respect to the first axis (A).

Abstract translation: MEMS装置（40）具有经由弹性连接元件（46）由框架（48）承载的平台（45），所述弹性连接元件构造成使平台能够围绕第一轴线（A）旋转。 轴承结构（41）通过第一弹性悬臂和第二弹性悬臂来支撑框架（48），所述第一弹性悬臂和第二弹性悬臂被配置为使得框架（48）能够围绕横向于第一轴线（A）的第二轴线（B）旋转。 弹性悬臂（49）通过相对于第二轴线（B）偏移布置的相应锚固部分（50）锚固到支承结构（41）。 应力传感器（51,52）由第一和第二传感器元件（51,52）形成，所述第一和第二传感器元件（51,52）分别布置在所述第一和第二悬臂（49）上，靠近所述锚固部分， 第二轴线（B）处于相对于第一轴线（A）对称的位置。