PACKAGED HIGH VOLTAGE MOSFET DEVICE WITH A DBC INTERCONNECTION SUBSTRATE AND MANUFACTURING PROCESS THEREOF

    公开(公告)号:EP3944309A1

    公开(公告)日:2022-01-26

    申请号:EP21184890.8

    申请日:2021-07-09

    Abstract: The HV MOSFET device has a body (35) integrating source conductive regions (37); projecting gate structures (46) above the body, laterally offset with respect to the source conductive regions (37); source contact regions (45), of a first metal, arranged on the body in electric contact with the source conductive regions (37); and source connection regions (48), of a second metal, arranged above the source contact regions (45) and having a height protruding with respect to the projecting gate structures (46). A package (59) includes a metal support (55) bonded to a second surface (35A) of the body; a dissipating region ,(32,57,72,73), above the first surface (35B) of the semiconductor die (31) and comprising a conductive plate (57) having a planar face (57A) bonded to the source connection regions (48) and spaced from the projecting gate structures; and a package mass (59) of dielectric material, between the support (55) and the dissipating region (32) and incorporating the semiconductor die (31). The dissipating region (32,57,72,73) is a DBC-type insulation multilayer (71) comprising the conductive plate (57), an intermediate insulating region (72), coupled to the conductive plate (57), and a top conductive region (73), coupled to the intermediate insulating region (72).

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