公开(公告)号：EP4376442A2

公开(公告)日：2024-05-29

申请号：EP24169393.6

申请日：2023-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： CERINI, Fabrizio ,  ADORNO, Silvia ,  SALINA, Marco

IPC: H04R17/00

CPC classification number: H04R7/06 ,  H04R17/00 ,  H04R2201/00320130101 ,  H04R2499/1120130101

Abstract: A microelectromechanical electroacoustic transducer includes a supporting frame (12) of semiconductor material, a membrane (13) of semiconductor material, connected to the supporting frame (12) along a perimeter and having central symmetry, and a piezoelectric actuator (15) on a peripheral portion of the membrane (13). The membrane (13) has through slits (17, 18) of elongated shape arranged around a center of the membrane (13). The through slits (17, 18) are at least partially closed on one side of the membrane (13) with strips (525) of polymeric material.

公开(公告)号：EP3985720A1

公开(公告)日：2022-04-20

申请号：EP21200601.9

申请日：2021-10-01

Applicant: STMicroelectronics S.r.l.

Inventor： CERINI, Fabrizio ,  ADORNO, Silvia ,  PACI, Dario ,  SALINA, Marco

IPC: H01L23/522 ,  H01L49/02 ,  H01L23/528

Abstract: An electrode structure (1) comprising: a pad (3) of conductive material; and a conductive strip (5) having a first end (5a) physically and electrically coupled to the pad (3), the electrode structure (1) being characterized in that the pad (3) comprises an annular element (7) internally defining a through opening (13), and in that the first end (5a) of the conductive strip (5) is physically and electrically coupled to the annular element (7) by a transition region (19) so that, when the conductive strip (5) undergoes expansion by the thermal effect, a stress spreads from the conductive strip (5) to the annular element (7) by the transition region (19).
Main figure: Figure 2B

公开(公告)号：EP4376442A3

公开(公告)日：2024-08-14

申请号：EP24169393.6

申请日：2023-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： CERINI, Fabrizio ,  ADORNO, Silvia ,  SALINA, Marco

IPC: H04R7/06 ,  H04R17/00

CPC classification number: H04R7/06 ,  H04R17/00 ,  H04R2201/00320130101 ,  H04R2499/1120130101

Abstract: A microelectromechanical electroacoustic transducer includes a supporting frame (12) of semiconductor material, a membrane (13) of semiconductor material, connected to the supporting frame (12) along a perimeter and having central symmetry, and a piezoelectric actuator (15) on a peripheral portion of the membrane (13). The membrane (13) has through slits (17, 18) of elongated shape arranged around a center of the membrane (13). The through slits (17, 18) are at least partially closed on one side of the membrane (13) with strips (525) of polymeric material.

公开(公告)号：EP4258691A1

公开(公告)日：2023-10-11

申请号：EP23164594.6

申请日：2023-03-28

Applicant: STMicroelectronics S.r.l.

Inventor： CERINI, Fabrizio ,  ADORNO, Silvia ,  SALINA, Marco

IPC: H04R7/06 ,  H04R17/00

Abstract: A microelectromechanical electroacoustic transducer includes a supporting frame (12) of semiconductor material, a membrane (13) of semiconductor material, connected to the supporting frame (12) along a perimeter and having central symmetry, and a piezoelectric actuator (15) on a peripheral portion of the membrane (13). The membrane (13) has through slits (17, 18) of elongated shape arranged around a center of the membrane (13).