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1.Microelectromechanical integrated sensor structure with rotary driving motion 有权
Title translation: 微机电体型传感器结构旋转驱动运动公开(公告)号:EP1832841B1
公开(公告)日:2015-12-30
申请号:EP06425163.0
申请日:2006-03-10
Applicant: STMicroelectronics Srl
IPC: G01C19/56
CPC classification number: G01C19/5712