公开(公告)号：EP2202484A1

公开(公告)日：2010-06-30

申请号：EP09179819.9

申请日：2009-12-18

Applicant: STMicroelectronics Srl

Inventor： Cazzaniga, Gabriele ,  Coronato, Luca ,  Calcaterra, Giacomo

IPC: G01C19/56 ,  G01P15/125

CPC classification number: B81B3/0018 ,  G01C19/5712 ,  Y10T29/49826

Abstract: An integrated microelectromechanical structure (30; 30'; 30") is provided with: a driving mass (3), anchored to a substrate (2a) via elastic anchorage elements (8a, 8b) and designed to be actuated in a plane (xy) with a driving movement; and a first sensing mass (15a; 15a') and a second sensing mass (15b; 15b'), suspended within, and coupled to, the driving mass (3) via respective elastic supporting elements (18) so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first (15a; 15a') and the second (15b; 15b') sensing masses are connected together via elastic coupling elements (32a, 32b), configured to couple their modes of vibration.

Abstract translation: 集成的微电子机械结构（30; 30'; 30“）设置有：驱动质量块（3），通过弹性锚固元件（8a，8b）锚固到基底（2a），并被设计成在平面（xy ）和通过相应的弹性支撑元件（18）悬挂在驱动质量块（3）内并联接到驱动质量块（3）上的第一感测质量块（15a; 15a'）和第二感测质量块（15b; 15b' 在所述驱动运动中相对于其固定，并且响应于角速度执行相应的检测运动，特别地，第一（15a; 15a'）和第二（15b; 15b'）感测质量块被连接 通过弹性联接元件（32a，32b）一起配置成耦合其振动模式。