公开(公告)号：EP2192382B1

公开(公告)日：2012-08-29

申请号：EP09177114.7

申请日：2009-11-25

Applicant: STMicroelectronics Srl

Inventor： Coronato, Luca ,  Cazzaniga, Gabriele ,  Zerbini, Sarah

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

公开(公告)号：EP2192383A1

公开(公告)日：2010-06-02

申请号：EP09177122.0

申请日：2009-11-25

Applicant: STMicroelectronics Srl

Inventor： Coronato, Luca ,  Cazzaniga, Gabriele ,  Zerbini, Sarah

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: Described herein is an integrated microelectromechanical structure (30), provided with: a driving mass (3), anchored to a substrate (2) via elastic anchorage elements (8a, 8b) and moved in a plane (xy) with a driving movement; and a first sensing mass (16a'), suspended inside, and coupled to, the driving mass via elastic supporting elements (20') so as to be fixed with respect to the driving mass (3) in the driving movement and to perform a detection movement of rotation out of the plane (xy) in response to a first angular velocity (Ω x ); the elastic anchorage elements (8a, 8b) and the elastic supporting elements (20') cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass (16a') at an end portion (31; 31') thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the aforesaid end portion.

Abstract translation: 本文描述的是集成的微机电结构（30），其设置有驱动质量块（3），通过弹性锚固元件（8a，8b）锚固到基底（2）并且在驱动运动的平面（xy）中移动; 以及第一感测质量块（16a'），其通过弹性支撑元件（20'）悬挂在驱动质量块内并且联接到驱动质量块，以便在驱动运动中相对于驱动质量块（3）固定，并执行 响应于第一角速度（x x）检测旋转出平面的运动（xy）; 弹性锚固元件（8a，8b）和弹性支撑元件（20'）使检测运动与驱动运动分离。 弹性支撑元件在其端部（31; 31'）处联接到第一感测块（16a'），并且检测运动的旋转轴线在第一感测质量块内仅延伸通过前述端部 。

公开(公告)号：EP2284488B1

公开(公告)日：2018-12-05

申请号：EP10171355.0

申请日：2010-07-30

Applicant: STMicroelectronics Srl

Inventor： Cazzaniga, Gabriele ,  Coronato, Luca ,  Simoni, Barbara

IPC: G01P15/125 ,  G01C19/5712 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01C19/5712 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/02 ,  G01P2015/0831

Abstract: A MEMS detection structure (10) comprising a substrate (2) having a top surface (2a) with at least a first fixed-electrode arrangement (5a); a sensing mass (3) extending in a plane (xy) and suspended above the substrate (2) and above the first fixed-electrode arrangement (5a) at a separation distance; and connection elastic elements (8a, 8b) supporting the sensing mass (3) for being freely rotatable out of the plane (xy), modifying the separation distance as a function of a detected quantity along an axis (z) orthogonal to the plane (xy). The MEMS detection structure further comprises a coupling mass (12), suspended above the substrate (2) and connected to the sensing mass (3) via the connection elastic elements (8a, 8b) and an anchoring arrangement (14, 15), which anchors the coupling mass (12) to the substrate (2) with at least a first point of constraint (13), set at a distance from the rotation axis (A) and in a position corresponding to the first fixed-electrode arrangement (5a).

公开(公告)号：EP2339293B1

公开(公告)日：2013-11-06

申请号：EP10196863.4

申请日：2010-12-23

Applicant: STMicroelectronics Srl

Inventor： Cazzaniga, Gabriele ,  Coronato, Luca

IPC: G01C19/5747

CPC classification number: G01C19/5747 ,  G01P9/02 ,  Y10T29/49826

公开(公告)号：EP2168909B1

公开(公告)日：2012-07-04

申请号：EP09171835.3

申请日：2009-09-30

Applicant: STMicroelectronics Srl

Inventor： Cazzaniga, Gabriele ,  Coronato, Luca

IPC: B81B3/00

CPC classification number: B81B3/0018 ,  B81B3/0013 ,  B81B2201/0235 ,  B81B2201/0242

公开(公告)号：EP2202484A1

公开(公告)日：2010-06-30

申请号：EP09179819.9

申请日：2009-12-18

Applicant: STMicroelectronics Srl

Inventor： Cazzaniga, Gabriele ,  Coronato, Luca ,  Calcaterra, Giacomo

IPC: G01C19/56 ,  G01P15/125

CPC classification number: B81B3/0018 ,  G01C19/5712 ,  Y10T29/49826

Abstract: An integrated microelectromechanical structure (30; 30'; 30") is provided with: a driving mass (3), anchored to a substrate (2a) via elastic anchorage elements (8a, 8b) and designed to be actuated in a plane (xy) with a driving movement; and a first sensing mass (15a; 15a') and a second sensing mass (15b; 15b'), suspended within, and coupled to, the driving mass (3) via respective elastic supporting elements (18) so as to be fixed with respect thereto in said driving movement and to perform a respective detection movement in response to an angular velocity. In particular, the first (15a; 15a') and the second (15b; 15b') sensing masses are connected together via elastic coupling elements (32a, 32b), configured to couple their modes of vibration.

Abstract translation: 集成的微电子机械结构（30; 30'; 30“）设置有：驱动质量块（3），通过弹性锚固元件（8a，8b）锚固到基底（2a），并被设计成在平面（xy ）和通过相应的弹性支撑元件（18）悬挂在驱动质量块（3）内并联接到驱动质量块（3）上的第一感测质量块（15a; 15a'）和第二感测质量块（15b; 15b' 在所述驱动运动中相对于其固定，并且响应于角速度执行相应的检测运动，特别地，第一（15a; 15a'）和第二（15b; 15b'）感测质量块被连接 通过弹性联接元件（32a，32b）一起配置成耦合其振动模式。

公开(公告)号：EP2192383B1

公开(公告)日：2018-10-03

申请号：EP09177122.0

申请日：2009-11-25

Applicant: STMicroelectronics Srl

Inventor： Coronato, Luca ,  Cazzaniga, Gabriele ,  Zerbini, Sarah

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: Described herein is an integrated microelectromechanical structure (30), provided with: a driving mass (3), anchored to a substrate (2) via elastic anchorage elements (8a, 8b) and moved in a plane (xy) with a driving movement; and a first sensing mass (16a'), suspended inside, and coupled to, the driving mass via elastic supporting elements (20') so as to be fixed with respect to the driving mass (3) in the driving movement and to perform a detection movement of rotation out of the plane (xy) in response to a first angular velocity (© x ); the elastic anchorage elements (8a, 8b) and the elastic supporting elements (20') cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass (16a') at an end portion (31; 31') thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the aforesaid end portion.

公开(公告)号：EP2339293A1

公开(公告)日：2011-06-29

申请号：EP10196863.4

申请日：2010-12-23

Applicant: STMicroelectronics Srl

Inventor： Cazzaniga, Gabriele ,  Coronato, Luca

IPC: G01C19/56

CPC classification number: G01C19/5747 ,  G01P9/02 ,  Y10T29/49826

Abstract: An integrated MEMS gyroscope (1; 1'; 1"), is provided with: at least a first driving mass (2a) driven with a first driving movement along a first axis (x) upon biasing of an assembly (13) of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope (1; 1'; 1"); and at least a second driving mass (2b) driven with a second driving movement along a second axis (y), transverse to the first axis (x), the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope (1; 1'; 1"). The integrated MEMS gyroscope is moreover provided with a first elastic coupling element (12a), which elastically couples the first driving mass (2a) and the second driving mass (2b) in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.

Abstract translation: 集成MEMS陀螺仪（1; 1“; 1”）设置有：至少第一驱动质量块（2a），其在驱动组件（13）的偏压时沿着第一轴线（x）以第一驱动运动驱动 在集成的MEMS陀螺仪（1; 1'; 1“）的旋转存在的情况下，产生至少一个感测运动的第一驱动运动; 以及至少第二驱动质量块（2b），其沿着第二轴线（y）沿第二轴线（y）被驱动，横向于所述第一轴线（x），所述第二驱动运动在存在旋转的情况下产生至少相应的感测运动 集成的MEMS陀螺仪还设置有第一弹性联接元件（12a），其弹性地联接第一驱动质量块（2a）和第二驱动质量块（2b） 以使得以给定的运动比例将第一驾驶运动耦合到第二驾驶运动。

公开(公告)号：EP2192382A1

公开(公告)日：2010-06-02

申请号：EP09177114.7

申请日：2009-11-25

Applicant: STMicroelectronics Srl

Inventor： Coronato, Luca ,  Cazzaniga, Gabriele ,  Zerbini, Sarah

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

Abstract: Integrated microelectromechanical structure (30), provided with: a die (2), having a substrate (2) and a frame (2b), defining inside it a detection region (2c) and having a first side extending along a first horizontal axis (x); a driving mass (3), anchored to the substrate (2), set in the detection region (2c), and rotatable in a plane (xy) with an actuation movement about a vertical axis (z); and first and second pairs (16a',16b';16c',16d') of first sensing masses, suspended inside the driving mass (3) via elastic supporting elements (20) so as to perform a detection movement of rotation out of the plane (xy) in response to a first angular velocity (Ω x ); wherein the first sensing masses of the first pair (16a',16b') and the first sensing masses of the second pair (16c',16d') are aligned in respective directions (x 1 , X 2 ), having non zero inclinations of opposite sign with respect to the first horizontal axis (x).

Abstract translation: 集成的微机电结构（30），具有：具有基板（2）和框架（2b）的模具（2），在其内部限定有检测区域（2c），并具有沿第一水平轴线延伸的第一侧面 X）; 固定到基板（2）上的驱动质量块（3），其设置在检测区域（2c）中，并且可以围绕垂直轴线（z）以致动运动在平面（xy）中旋转; 以及经由弹性支撑元件（20）悬挂在驱动质量块（3）内部的第一感测质量的第一和第二对（16a'，16b'; 16c'，16d'），以便执行从 平面（xy）响应于第一角速度（x x）; 其中第一对（16a'，16b'）的第一感测质量和第二对（16c'，16d'）的第一感测质量在相应的方向（x 1，X 2）上对准， 相对于第一横轴（x）相反的符号。