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1.Alignment measurement system to determine alignment between chips 有权
Title translation: 系统,用于测量的芯片之间的对准公开(公告)号:EP1763078B1
公开(公告)日:2013-04-10
申请号:EP05019639.3
申请日:2005-09-09
Applicant: STMicroelectronics Srl
Inventor: Canegallo, Roberto , Mirandola, Mario , Fazzi, Alberto , Magagni, Luca , Guerrieri Roberto
IPC: H01L25/065
CPC classification number: G01R31/2891 , G01R31/312 , H01L25/0657 , H01L2225/06513 , H01L2225/06593 , H01L2225/06596 , H01L2924/0002 , H01L2924/3011 , H01L2924/00