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1.发明授权Process for manufacturing an integrated membrane of nozzles in MEMS technology for a spray device 有权一种用于制造在MEMS技术的集成膜的喷嘴用于喷射装置的方法
公开(公告)号：EP2204238B1
公开(公告)日：2014-10-29
申请号：EP09180395.7
申请日：2009-12-22
Applicant: STMicroelectronics Srl
Inventor： Merassi, Angelo Antonio , Pesci, Angelo , Vigna, Benedetto , Galeazzi, Ernestino , Mantovani, Marco
CPC classification number: A61M15/009 , B05B1/14 , B05B17/0638 , B05D7/00 , B81B2201/058 , B81B2203/0127 , B81C1/00087 , Y10T29/49401
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2.发明公开Process for manufacturing an integrated membrane of nozzles in mems technology for a spray device, and spray device using such membrane 有权在法国电子科技大学的Verfahren zur Herstellung einer integriertenDüsenmembrane
公开(公告)号：EP2204238A1
公开(公告)日：2010-07-07
申请号：EP09180395.7
申请日：2009-12-22
Applicant: STMicroelectronics Srl
Inventor： Merassi, Angelo Antonio , Pesci, Angelo , Vigna, Benedetto , Galeazzi, Ernestino , Mantovani, Marco
CPC classification number: A61M15/009 , B05B1/14 , B05B17/0638 , B05D7/00 , B81B2201/058 , B81B2203/0127 , B81C1/00087 , Y10T29/49401
Abstract: A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate (11), forming a membrane layer (13) on the substrate (11), forming a plurality of nozzles (14) in the membrane layer (13), forming a plurality of supply channels (15) in the substrate (10), each supply channel being substantially aligned in a vertical direction to a respective nozzle (14) of the plurality of nozzles and in direct communication with the respective nozzle.
Abstract translation: 一种用于制造喷雾装置的喷嘴膜的方法，包括以下步骤：在所述基材（11）上铺设基材（11），形成膜层（13），在所述膜层中形成多个喷嘴（14） （13），在所述基板（10）中形成多个供给通道（15），每个供应通道在垂直方向上与所述多个喷嘴的相应喷嘴（14）大致对准，并且与相应喷嘴直接连通 。
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