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    Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof
    3.
    发明公开
    Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof 有权
    Anordnung eines kapazitiven mikroelektromechanischen Akustikwandlers und Verpackungdafür

    公开(公告)号：EP2252077A1

    公开(公告)日：2010-11-17

    申请号：EP09425179.0

    申请日：2009-05-11

    Applicant: STMicroelectronics Srl

    Inventor： Conti, Sebastiano ,  Vigna, Benedetto ,  Cortese, Mario Francesco

    IPC: H04R19/00 ,  H04R19/04 ,  H04R1/08 ,  B81C1/00

    CPC classification number: B81C1/00158 ,  B81B3/0018 ,  B81B7/0061 ,  B81B2201/0257 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2224/48145 ,  H01L2224/48479 ,  H01L2924/00014 ,  H01L2924/16151 ,  H01L2924/16152 ,  H04R1/04 ,  H04R1/06 ,  H04R1/086 ,  H04R1/2838 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003 ,  H01L2224/48471 ,  H01L2224/4554 ,  H01L2924/00012

    Abstract: A microelectromechanical-acoustic-transducer assembly (30) has: a first die (20) integrating a MEMS sensing structure (1) having a membrane (2), which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer (30), is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode (3) so as to form a variable-capacitance capacitor; a second die (21), integrating an electronic reading circuit operatively coupled to the MEMS sensing structure (1) and supplying an electrical output signal as a function of the capacitive variation; and a package (40), housing the first die (20) and the second die (21) and having a base substrate (42) with electrical contacts (48) towards the outside world. The first and second dice are set stacked in the package and directly connected together mechanically and electrically; the package delimits at least one between the front and back chambers.

    Abstract translation: 微机电声换能器组件（30）具有：集成具有膜（2）的MEMS感测结构（1）的第一管芯（20），其具有与前室和第二表面流体连通的第一表面， 与第一表面相反，与微机电声换能器（30）的后室流体连通，能够经受作为入射声压波的函数的变形，并且面对刚性电极（3）以形成 变容电容器; 集成了可操作地耦合到MEMS感测结构（1）并且提供作为电容变化的函数的电输出信号的电子阅读电路的第二裸片（21） 和一个容纳第一管芯（20）和第二管芯（21）的封装（40），并具有朝向外界的电触点（48）的基底（42）。 第一和第二骰子被堆叠在包装中并且机械和电气直接连接在一起; 包装在前室和后室之间划定至少一个。

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