公开(公告)号：EP2194391B8

公开(公告)日：2012-05-09

申请号：EP09177168.3

申请日：2009-11-26

Applicant: STMicroelectronics Srl

Inventor： Riva, Caterina ,  Morelli, Marco ,  Marchesi, Marco

IPC: G01R33/05 ,  G01R33/07

CPC classification number: G01R33/05 ,  G01R33/07

公开(公告)号：EP2194391A1

公开(公告)日：2010-06-09

申请号：EP09177168.3

申请日：2009-11-26

Applicant: STMicroelectronics Srl

Inventor： Riva, Caterina ,  Morelli, Marco ,  Marchesi, Marco

IPC: G01R33/05 ,  G01R33/07

CPC classification number: G01R33/05 ,  G01R33/07

Abstract: A magnetic sensor is formed by a fluxgate sensor and by at least one Hall sensor integrated in a same integrated device, wherein the magnetic core of the fluxgate sensor is formed by a magnetic region that operates also as a concentrator for the Hall sensor. The magnetic region is manufactured in a post-machining stage on the metallization layers wherein the energizing coil and sensing coil of the fluxgate sensor are formed; the energizing and sensing coils are formed on a semiconductor substrate housing the conductive regions of the Hall sensor.

Abstract translation: 磁传感器由磁通门传感器和集成在同一集成装置中的至少一个霍尔传感器形成，其中磁通门传感器的磁芯由还用作霍尔传感器的集中器的磁区形成。 在金属化层的后加工阶段制造磁性区域，其中形成磁通门传感器的激励线圈和感测线圈; 激励感测线圈形成在容纳霍尔传感器的导电区域的半导体衬底上。