公开(公告)号：EP2194391B8

公开(公告)日：2012-05-09

申请号：EP09177168.3

申请日：2009-11-26

Applicant: STMicroelectronics Srl

Inventor： Riva, Caterina ,  Morelli, Marco ,  Marchesi, Marco

IPC: G01R33/05 ,  G01R33/07

CPC classification number: G01R33/05 ,  G01R33/07

公开(公告)号：EP2333573B1

公开(公告)日：2012-10-24

申请号：EP10193056.8

申请日：2010-11-30

Applicant: STMicroelectronics Srl

Inventor： Paci, Dario ,  Iuliano, Paolo ,  Riva, Caterina ,  Morelli, Marco

IPC: G01R33/04 ,  G01R33/00 ,  G01R33/07

CPC classification number: G01R33/04 ,  G01R33/0005 ,  G01R33/0047 ,  G01R33/0052 ,  G01R33/072

公开(公告)号：EP2333573A1

公开(公告)日：2011-06-15

申请号：EP10193056.8

申请日：2010-11-30

Applicant: STMicroelectronics Srl

Inventor： Paci, Dario ,  Iuliano, Paolo ,  Riva, Caterina ,  Morelli, Marco

IPC: G01R33/04 ,  G01R33/00 ,  G01R33/07

CPC classification number: G01R33/04 ,  G01R33/0005 ,  G01R33/0047 ,  G01R33/0052 ,  G01R33/072

Abstract: The integrated magnetic sensor (19) for detecting an external magnetic field, is formed by a body (21) of semiconductor material having a surface (25); an insulating layer (28, 36, 37) covering the body of semiconductor material; a magnetically sensitive region, for example a Hall cell (22), extending inside the body; and a concentrator (33) of ferromagnetic material, extending on the Hall cell and having a planar portion (35) extending parallel to the surface of the substrate on the insulating layer (28, 36, 37). The concentrator (33) terminates with a tip (34) protruding peripherically from, and transversely to, the planar portion (35) toward the Hall cell (22). When the magnetically sensitive region is a sensing coil (3a-3d) of a fluxgate sensor, it is formed on the substrate, embedded in the insulating layer, and the tip (47) of the concentrator can reach as far as the sensing coil.

Abstract translation: 对于外部磁场的检测集成磁性传感器（19），由具有表面（25）的半导体材料的本体（21）形成的; 绝缘层（28，36，37）覆盖的半导体材料的主体的; 磁敏感区域，例如霍尔小区（22）的主体的内部延伸; 和铁磁材料的浓缩器（33），扩展在霍尔电池和具有绝缘层（28，36，37）在基板的表面上的平面部分（35）平行延伸。 集中器（33）与来自peripherically突出的尖端（34）终止，且横向于朝向霍尔元件（22）的平面部分（35）。 当磁性敏感区域是磁通门传感器的感测线圈（3A-3D），它形成在基片，嵌入绝缘层中，和所述集中器的尖端（47）可以尽可能的传感线圈达到。

公开(公告)号：EP2194391A1

公开(公告)日：2010-06-09

申请号：EP09177168.3

申请日：2009-11-26

Applicant: STMicroelectronics Srl

Inventor： Riva, Caterina ,  Morelli, Marco ,  Marchesi, Marco

IPC: G01R33/05 ,  G01R33/07

CPC classification number: G01R33/05 ,  G01R33/07

Abstract: A magnetic sensor is formed by a fluxgate sensor and by at least one Hall sensor integrated in a same integrated device, wherein the magnetic core of the fluxgate sensor is formed by a magnetic region that operates also as a concentrator for the Hall sensor. The magnetic region is manufactured in a post-machining stage on the metallization layers wherein the energizing coil and sensing coil of the fluxgate sensor are formed; the energizing and sensing coils are formed on a semiconductor substrate housing the conductive regions of the Hall sensor.

Abstract translation: 磁传感器由磁通门传感器和集成在同一集成装置中的至少一个霍尔传感器形成，其中磁通门传感器的磁芯由还用作霍尔传感器的集中器的磁区形成。 在金属化层的后加工阶段制造磁性区域，其中形成磁通门传感器的激励线圈和感测线圈; 激励感测线圈形成在容纳霍尔传感器的导电区域的半导体衬底上。