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1.Mems-type high-sensitivity inertial sensor and manufacturing process thereof 有权
Title translation: Mems型高灵敏度惯性传感器及其制造工艺公开(公告)号:EP1624284B1
公开(公告)日:2017-07-19
申请号:EP04425573.5
申请日:2004-07-29
Applicant: STMicroelectronics Srl
Inventor: Sassolini, Simone , del Sarto, Marco , Baldo, Lorenzo , Marchi, Mauro
IPC: G01C19/5755 , G01C19/5769
CPC classification number: G01C19/5755 , G01C19/5769
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2.Micro-electro-mechanical gyroscope having electrically insulated regions 有权
Title translation: MEMS陀螺仪具有电绝缘区公开(公告)号:EP1677073B1
公开(公告)日:2013-06-19
申请号:EP04425957.0
申请日:2004-12-29
Applicant: STMicroelectronics Srl
Inventor: Spinola Durante, Guido , Sassolini, Simone , Rusconi Clerici, Andrea
IPC: G01C19/56
CPC classification number: G01C19/5762 , G01C19/5747
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3.Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof 有权
Title translation: 一种微机电结构与电隔离区,以及它们的制备方法公开(公告)号:EP1617178B1
公开(公告)日:2017-04-12
申请号:EP04425514.9
申请日:2004-07-12
Applicant: STMicroelectronics Srl
Inventor: Spinola Durante, Guido , Sassolini, Simone , Ferrera, Marco , Marchi, Mauro
IPC: G01C19/5769
CPC classification number: G01C19/5769
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4.Analog data-input device provided with a microelectromechanical pressure sensor 有权
Title translation: 设置有微 - 电 - 机械压力传感器的模拟数据输入装置公开(公告)号:EP1707931B1
公开(公告)日:2013-03-27
申请号:EP05425183.0
申请日:2005-03-31
Applicant: STMicroelectronics Srl
Inventor: Baldo, Lorenzo , Combi, Chantal , Sassolini, Simone , Del Sarto, Marco
IPC: G01L9/00 , G01L1/20 , H01H13/785 , G06F3/041 , G01L19/14
CPC classification number: G06F3/041 , G01L9/0045 , G01L9/0054 , G01L19/141 , G01L19/147 , G06F3/0338 , H01H13/785 , H01H2201/02 , H01H2201/036 , H01H2221/012 , H01H2239/01 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2924/16195 , H01L2924/181 , H01L2924/00012 , H01L2924/00014
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