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1.Mems-type high-sensitivity inertial sensor and manufacturing process thereof 有权
Title translation: Mems型高灵敏度惯性传感器及其制造工艺公开(公告)号:EP1624284B1
公开(公告)日:2017-07-19
申请号:EP04425573.5
申请日:2004-07-29
Applicant: STMicroelectronics Srl
Inventor: Sassolini, Simone , del Sarto, Marco , Baldo, Lorenzo , Marchi, Mauro
IPC: G01C19/5755 , G01C19/5769
CPC classification number: G01C19/5755 , G01C19/5769
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2.Micro-electro-mechanical structure having electrically insulated regions and manufacturing process thereof 有权
Title translation: 一种微机电结构与电隔离区,以及它们的制备方法公开(公告)号:EP1617178B1
公开(公告)日:2017-04-12
申请号:EP04425514.9
申请日:2004-07-12
Applicant: STMicroelectronics Srl
Inventor: Spinola Durante, Guido , Sassolini, Simone , Ferrera, Marco , Marchi, Mauro
IPC: G01C19/5769
CPC classification number: G01C19/5769
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3.Process for bonding and electrically connecting microsystems integrated in several distinct substrates 有权
Title translation: 该方法以结合多个不同的衬底的集成微系统和电连接公开(公告)号:EP1296374B1
公开(公告)日:2012-09-05
申请号:EP01830590.4
申请日:2001-09-14
Applicant: STMicroelectronics Srl , Hewlett-Packard Company
Inventor: Mastromatteo, Ubaldo , Bombonati, Mauro , Morin, Daniela , Mottura, Marta , Marchi, Mauro
CPC classification number: B81C1/00269 , H01L21/185 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/81 , H01L24/94 , H01L2224/0231 , H01L2224/02313 , H01L2224/0401 , H01L2224/05124 , H01L2224/05181 , H01L2224/05624 , H01L2224/10126 , H01L2224/10135 , H01L2224/13021 , H01L2224/1308 , H01L2224/13082 , H01L2224/13124 , H01L2224/13164 , H01L2224/81136 , H01L2224/81139 , H01L2224/812 , H01L2224/81201 , H01L2224/81385 , H01L2224/81801 , H01L2924/00013 , H01L2924/01006 , H01L2924/01013 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01073 , H01L2924/01078 , H01L2924/01322 , H01L2924/14 , H01L2924/00014 , H01L2224/13099 , H01L2224/29099 , H01L2924/013
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4.Process for manufacturing deep through vias in a semiconductor device, and semiconductor device made thereby. 有权
Title translation: 在半导体器件中制造用于“深通孔”工艺公开(公告)号:EP1788624B1
公开(公告)日:2010-06-09
申请号:EP05425807.4
申请日:2005-11-16
Applicant: STMicroelectronics Srl
Inventor: Marchi, Mauro , Ferrera, Marco , Riva, Caterina
IPC: H01L23/48
CPC classification number: B81B7/0006 , B81B2201/0242 , B81B2201/0257 , H01L21/76267 , H01L21/76898 , H01L23/481 , H01L2924/0002 , H01L2924/00012 , H01L2924/00
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公开(公告)号:EP2202791B1
公开(公告)日:2016-01-27
申请号:EP10160512.9
申请日:2005-11-16
Applicant: STMicroelectronics Srl
Inventor: Marchi, Mauro , Ferrera, Marco , Riva, Caterina
IPC: H01L23/48 , H01L21/762 , H01L21/768 , B81B7/00
CPC classification number: B81B7/0006 , B81B2201/0242 , B81B2201/0257 , H01L21/76267 , H01L21/76898 , H01L23/481 , H01L2924/0002 , H01L2924/00012 , H01L2924/00
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