公开(公告)号：EP2963387A1

公开(公告)日：2016-01-06

申请号：EP15172600.7

申请日：2015-06-17

Applicant: STMicroelectronics Srl

Inventor： Falorni, Luca Giuseppe ,  Valzasina, Carlo ,  Carminati, Roberto ,  Tocchio, Alessandro

IPC: G01C19/5733 ,  B81B3/00 ,  G01C19/5747

CPC classification number: G01C19/5712 ,  B81B3/0018 ,  B81B3/0086 ,  B81B2201/025 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747

Abstract: The MEMS device (1) has a support region (11) elastically carrying a suspended mass (2) through first elastic elements (5; 30-37). A tuned dynamic absorber (3, 6) is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber (3, 6) is formed by a damping mass (3) coupled to the suspended mass (2) through second elastic elements (6). In an embodiment, the suspended mass (2) and the damping mass (3) are formed in a same structural layer, for example of semiconductor material, and the damping mass (3) is surrounded by the suspended mass (2).

Abstract translation: 的MEMS装置（1）具有一个支承区（11）可弹性携带通过第一弹性元件（5; 30-37）一悬挂质量（2）。 甲调谐动力吸振器（3,6）被弹性地联接到所述悬挂质量和配置为抑制作用于悬挂质量的动力吸振器的固有振荡频率的正交力。 调谐动力吸振器（3,6）是通过（6）第二弹性元件连接到所述悬挂质量（2）阻尼块（3）形成的。 在悬挂质量（2）的实施方式和阻尼块（3）形成在一个相同的结构层，半导体材料的实施例，而阻尼块（3）由所述悬挂质量（2）所包围。