公开(公告)号：EP2399672A3

公开(公告)日：2012-06-13

申请号：EP11171813.6

申请日：2011-06-28

Applicant: STMicroelectronics Srl

Inventor： Ziglioli, Federico Giovanni ,  Maierna, Amedeo ,  Mastromatteo, Ubaldo ,  Barlocchi, Gabriele ,  Villa, Flavio Francesco

IPC: B01L3/00 ,  G01N35/00 ,  C12Q1/00

CPC classification number: B01L3/502715 ,  B01L2200/027 ,  B01L2300/044 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0672 ,  B01L2300/0816 ,  B01L2300/0867 ,  B01L2300/1827 ,  B01L2400/0439 ,  Y10T436/11

Abstract: A fluidic cartridge (35; 135) for detecting chemicals, formed by a casing (40; 140), hermetically housing an integrated device (20) having a plurality of detecting regions (22) to bind with target chemicals; part of a supporting element (41; 141), bearing the integrated device; a reaction chamber (65; 165), facing the detecting regions (22); a sample feeding hole (50, 51; 150) and a washing feeding hole (52; 152), self-sealingly closed; fluidic paths (63, 64, 70, 71; 163, 164, 170, 171), which connect the sample feeding and washing feeding holes (50-52; 150, 152) to the reaction chamber (65; 165); and a waste reservoir (80; 180), which may be fluidically connected to the reaction chamber by valve elements (82, 76; 182, 176) that may be controlled from outside. The integrated device is moreover connected to an interface unit (42) carried by the supporting element (41; 141), electrically connected to the integrated device and including at least one signal processing stage and external contact regions (75; 175).

公开(公告)号：EP1577656B1

公开(公告)日：2010-06-09

申请号：EP04425197.3

申请日：2004-03-19

Applicant: STMicroelectronics Srl

Inventor： Villa, Flavio Francesco ,  Barlocchi, Gabriele ,  Corona, Pietro ,  Vigna, Benedetto ,  Baldo, Lorenzo

IPC: G01L9/00

CPC classification number: G01L9/0073 ,  G01L9/0045

公开(公告)号：EP2096448B1

公开(公告)日：2016-01-20

申请号：EP09161586.4

申请日：2005-01-25

Applicant: STMicroelectronics Srl

Inventor： Combi, Chantal ,  Baldo, Lorenzo ,  Faralli, Dino ,  Villa, Flavio Francesco

IPC: G01P15/12 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01P15/123 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084

Abstract: A manufacturing process of a semiconductor piezoresistive accelerometer (35) includes the steps of: providing a wafer (11) of semiconductor material; providing a membrane (23) in the wafer (11) over a cavity (22); rigidly coupling an inertial mass (25) to the membrane (23); and providing, in the wafer (11), piezoresistive transduction elements (24), that are sensitive to strains of the membrane (23) and generate corresponding electrical signals. The step of coupling is carried out by forming the inertial mass (25) on top of a surface of the membrane (23) opposite to the cavity (22). The accelerometer (35) is advantageously used in a device for monitoring the pressure (30) of a tyre of a vehicle. The cavity may be formed as a buried cavity. The mass may be formed by silk-screen printing of a metal paste.

公开(公告)号：EP2352024B1

公开(公告)日：2013-04-24

申请号：EP11152632.3

申请日：2011-01-29

Applicant: STMicroelectronics Srl

Inventor： Ziglioli, Federico Giovanni ,  Maierna, Amedeo ,  Villa, Flavio Francesco ,  Mastromatteo, Ubaldo ,  Barlocchi, Gabriele

IPC: G01N33/00

CPC classification number: G01N33/0009

公开(公告)号：EP2204641A1

公开(公告)日：2010-07-07

申请号：EP09180955.8

申请日：2009-12-30

Applicant: STMicroelectronics Srl

Inventor： Mastromatteo, Ubaldo ,  Villa, Flavio Francesco ,  Barlocchi, Gabriele

IPC: G01G3/13

CPC classification number: G01G3/13 ,  G01G3/16 ,  G01N29/036 ,  G01N2291/0256 ,  Y10T29/42

Abstract: An electronic microbalance (1) made in a semiconductor body (2) accommodating an oscillating circuit (38) adjacent to a diaphragm (18; 121;151). A stack formed by a first electrode (10), a second electrode (15), and a piezoelectric region (11) arranged between the first and the second electrode extends above the diaphragm. Any substance that deposits on the stack causes a change in the mass of the microbalance and thus in the resonance frequency of a resonator formed by the microbalance and the oscillator (19) connectable thereto and can thus be detected electronically. A chemical sensor is obtained by forming a sensitive layer (16) of a material suitable for binding to target chemicals on the stack.

Abstract translation: 在半导体主体（2）容纳在振荡电路（38）相邻于振动板制成的电子微量天平（1）（18; 121; 151）。 所述第一和第二电极之间布置（11）由第一电极（10）形成的叠层，一个第二电极（15），和一个压电区域隔膜上方延伸。 任何物质确实沉积在堆叠在由微量天平和振荡器（19）与其连接，因此可以电子地检测形成的谐振器的谐振频率使得在微天平的质量的变化，因此。 化学传感器是通过形成适于结合靶在堆栈上的化学物质的材料制成的感光层（16）中获得。