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公开(公告)号:JPH10116582A
公开(公告)日:1998-05-06
申请号:JP26847996
申请日:1996-10-09
Applicant: SUMITOMO ELECTRIC INDUSTRIES
Inventor: NUMAZAWA TOSHIYUKI , KAWARABAYASHI JUN , TAKADA EIJI , NAKAZAWA MASAHARU
Abstract: PROBLEM TO BE SOLVED: To provide a micro photomultiplier array having an improved resolution. SOLUTION: This micro photomultipliter array is formed out of a plurality of metallic plates 100 stacked on top of each other, and each of the metallic plates 100 is formed to have a plurality of small channel holes 11 of square cross section with the prescribed angle of slope along the same direction. In this case, the metallic plates 100 are stacked so that the slopes of the small channel holes 11 are alternated with each other, and the positions of the small channel holes 11 agree to each other at the prescribed dislocation between 0% and 50% relative to the length of one side of each hole 11.