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    OPTICAL SWITCH
    1.
    发明专利
    OPTICAL SWITCH 未知

    公开(公告)号：CA2450634A1

    公开(公告)日：2002-12-27

    申请号：CA2450634

    申请日：2002-05-29

    Applicant: SUMITOMO ELECTRIC INDUSTRIES

    Inventor： OKUYAMA HIROSHI ,  MIURA KOUSUKE ,  HIRATA YOSHIHIRO ,  SANO TOMOMI ,  KANIE TOMOHIKO ,  NUMAZAWA TOSHIYUKI

    IPC: G02B6/35 ,  G02B26/08

    Abstract: An optical switch has a platform, and an optical fiber is held in an optical fiber fixing V-shaped groove of the platform. A switch member is placed on t he platform. The switch member has a frame body, and the platform and a plurali ty of supplied positioning columns are provided on the lower side of the frame body. A cantilever beam is fixed to the frame body, and a mirror is fitted t o the end of this cantilever beam. A pair of electrodes are fixed on the platform. The mirror is vertically moved by applying a voltage between the electrodes and the cantilever beam to generate an electrostatic force there between.

    3.
    发明专利
    未知

    公开(公告)号：DE60218985T2

    公开(公告)日：2007-12-20

    申请号：DE60218985

    申请日：2002-01-22

    Applicant: SUMITOMO ELECTRIC INDUSTRIES

    Inventor： HIRATA YOSHIHIRO ,  HAGA TSUYOSHI ,  NUMAZAWA TOSHIYUKI ,  NAKAMAE KAZUO ,  OKADA KAZUNORI ,  YORITA JUN

    IPC: G01R1/067 ,  G01R3/00 ,  G01R15/24 ,  H01L21/66

    Abstract: A contact is formed of a tip end portion (11) approximately cylindrical as a whole in shape, having at one end a contact end to come into contact with a circuit under test, and a base portion (12) provided to be opposed to and kept apart from the other end that is opposite to the contact end of the tip end portion. By pressing the tip end portion into contact with a circuit under test (20), the tip end portion and the base portion are brought into contact with each other, and further pushing causes dislocation at the contact surfaces (14,15) so that the tip end portion is moved in a direction parallel to a surface of the circuit under test. Therefore, when the contact probe is pressed into contact with the circuit under test, the contact end of the contact probe is moved such that it scrapes off the surface of the circuit under test to break the insulating film on the surface, resulting in reliable contact with the circuit under test.

    5.
    发明专利
    未知

    公开(公告)号：DE60218985D1

    公开(公告)日：2007-05-03

    申请号：DE60218985

    申请日：2002-01-22

    Applicant: SUMITOMO ELECTRIC INDUSTRIES

    Inventor： HIRATA YOSHIHIRO ,  HAGA TSUYOSHI ,  NUMAZAWA TOSHIYUKI ,  NAKAMAE KAZUO ,  OKADA KAZUNORI ,  YORITA JUN

    IPC: G01R1/067 ,  G01R3/00 ,  G01R15/24 ,  H01L21/66

    Abstract: A contact is formed of a tip end portion (11) approximately cylindrical as a whole in shape, having at one end a contact end to come into contact with a circuit under test, and a base portion (12) provided to be opposed to and kept apart from the other end that is opposite to the contact end of the tip end portion. By pressing the tip end portion into contact with a circuit under test (20), the tip end portion and the base portion are brought into contact with each other, and further pushing causes dislocation at the contact surfaces (14,15) so that the tip end portion is moved in a direction parallel to a surface of the circuit under test. Therefore, when the contact probe is pressed into contact with the circuit under test, the contact end of the contact probe is moved such that it scrapes off the surface of the circuit under test to break the insulating film on the surface, resulting in reliable contact with the circuit under test.

    FORMING METHOD OF FINE STRUCTURE ELEMENT
    8.
    发明专利
    FORMING METHOD OF FINE STRUCTURE ELEMENT 失效

    公开(公告)号：JPH07307261A

    公开(公告)日：1995-11-21

    申请号：JP10037494

    申请日：1994-05-16

    Applicant: SUMITOMO ELECTRIC INDUSTRIES

    Inventor： NUMAZAWA TOSHIYUKI

    IPC: H01L21/027 ,  B81B1/00 ,  B81C1/00

    Abstract: PURPOSE:To provide a easily, simple forming method with high precision for a fine structure element having a high aspect ratio can be formed. CONSTITUTION:A process in which a resist layer 8 is formed on a substrate 1, a process in which the resist layer 8 is patterned by a lithography method with a synchrotron emission beam and a process in which a fine structure element is deposited by electroforming following the resist pattern are provided. In the forming method of the fine structure element like this, the process in which the resist layer 8 is formed on the substrate 1 has a process in which a frame member 3 having a hollow part 3m is placed on the substrate 1, a process in which the hollow part 3m is filled with syrup 4 containing monomer and polymer obtained by polymerizing the monomer and a polymerization completing process in which the syrup 4 is completely polymerized on the substrate 1.

    FORMING METHOD OF MICROSTRUCTURE
    9.
    发明专利
    FORMING METHOD OF MICROSTRUCTURE 失效

    公开(公告)号：JPH08162387A

    公开(公告)日：1996-06-21

    申请号：JP29937994

    申请日：1994-12-02

    Applicant: SUMITOMO ELECTRIC INDUSTRIES

    Inventor： NUMAZAWA TOSHIYUKI

    IPC: G03F7/30 ,  B81C1/00 ,  G03F7/20 ,  H01L21/027

    Abstract: PURPOSE: To provide a method of forming a body of microstructure larger in thickness by a method wherein a thicker resist is exposed and developed. CONSTITUTION: A microstructure is formed through such a manner that a resist layer formed on a substrate is irradiated with synchrotron radiation for light exposure to obtain a required pattern, the substrate is dipped into developing solution for developing to obtain a resist pattern, and a microstructure is formed basing on the resist pattern, wherein one of three means, a first means which makes the substrate stay longer in developing solution, a second means which gives ultrasonic vibrations to developing solution, and a third means which uses a filter that absorbs the long-wavelength component of the synchrotron radiation, is provided.

    OPTICAL SWITCH
    10.
    发明专利
    OPTICAL SWITCH 审中-公开

    公开(公告)号：JP2003248182A

    公开(公告)日：2003-09-05

    申请号：JP2002048474

    申请日：2002-02-25

    Applicant: SUMITOMO ELECTRIC INDUSTRIES

    Inventor： NUMAZAWA TOSHIYUKI

    IPC: G02B26/08 ,  B81B3/00

    Abstract: PROBLEM TO BE SOLVED: To provide an optical switch in which a stroke can be increased while a drive voltage is lowered. SOLUTION: The optical switch 1 comprises a plane waveguide 2 having electrodes 6 provided on an upper surface. A cantilever beam 13 of a movable member 12 is supported in a cantilever manner in the waveguide 2, and a mirror 14 for shutting off a light passing over an optical path of the waveguide 2 is fixed to the distal end of the beam 13. A plurality of drive auxiliary protrusions 15 for supplementing the drive of the member 12 are provided in a pectinated state on the beam 13. A plurality of recesses 15 for housing the protrusions in which the protrusions 15 are intruded, are provided in the waveguide 2. Electrodes 17 are provided on the bottoms and both side faces of the recesses 16. When a voltage is applied between the member 12 and the electrodes 6, 17, an electrostatic force is generated, and the mirror 14 is moved down. COPYRIGHT: (C)2003,JPO

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