公开(公告)号：JP2001050210A

公开(公告)日：2001-02-23

申请号：JP22499899

申请日：1999-08-09

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： SAKAKI KAZUTOSHI ,  SATO YASUMASA ,  SHIBUKAWA TAKASHI

IPC: H01J37/20 ,  F15B15/00 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide an X-Y table without a motor. SOLUTION: An X-Y table 30 comprises an X actuator 10 including an X guide shaft 11 and an X slider 12 movable along the X guide shaft 11 and a Y actuator 20 including a Y guide shaft 21 and a Y slider 22 movable along the Y guide shaft. In the X actuator 10, a pressure chamber is formed between the circumference of the X guide shaft 11 and the X slider 12, and the X slider 12 is provided with a bulkhead to axially divide the pressure chamber into two cylinder chambers. Compressed air can come into and go out of each of the cylinder chambers through passages provided in the X guide shaft 11. The Y actuator 20 is constituted the same as the X actuator 10. By linking both ends of the Y guide shaft 21 with the X slider 12, the X-Y table 30 attached to the Y slider 22 can be moved along either the X axis or the Y axis.

公开(公告)号：JP2002297243A

公开(公告)日：2002-10-11

申请号：JP2001098446

申请日：2001-03-30

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： SAKAKI KAZUTOSHI ,  MAKINO FUMINORI ,  SHIBUKAWA TAKASHI

IPC: F15B9/09 ,  F16K11/07 ,  F16K37/00 ,  G05D7/06

Abstract: PROBLEM TO BE SOLVED: To provide a spool type flow rate control valve which can be operated at high speed and high accuracy. SOLUTION: This spool type flow rate control valve is provided with a static pressure air bearing for supporting valve elements 2-1 and 2-3 of a spool 2 in a state that the valve elements are not in contact with a sleeve 1 and a position detector 6 for detecting the position of the spool in a non-contact state. The detected value of the position detector is fed back to an actuator 3 so that the position control can be realized.

公开(公告)号：JP2001050212A

公开(公告)日：2001-02-23

申请号：JP22500799

申请日：1999-08-09

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： SAKAKI KAZUTOSHI ,  SHIBUKAWA TAKASHI

IPC: H01L21/027 ,  F15B15/14 ,  F16C32/06

Abstract: PROBLEM TO BE SOLVED: To provide a fluid pressure actuator without using a motor. SOLUTION: This actuator 10 comprises a guiding shaft 11 and a slider 12 movable along with it. The actuator 10 is provided with a pressure chamber between the periphery of the guiding shaft 11 and the slider 12, and a partition 13 dividing the pressure chamber into two cylinder chambers 16a, 16b in the axial direction is formed on the slider, and compressed air can get in and out of the divided cylinder chambers through a path 11-1 formed in the guiding shaft.