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公开(公告)号：KR20180052773A
公开(公告)日：2018-05-18
申请号：KR20187012785
申请日：2011-02-07
Applicant: SUNEDISON INC
Inventor： PITNEY JOHN A , YOSHIMURA ICHIRO , FEI LU
IPC: H01L21/02 , H01L21/762 , H01L21/84
CPC classification number: H01L21/76254 , H01L21/02024 , H01L21/02052
Abstract: 본발명은비접합영역이줄어든실리콘온 인슐레이터구조체의준비, 및핸들및 도너웨이퍼의롤-오프양(ROA)을최소화함으로써그러한웨이퍼를생성하는방법에관한것이다. 웨이퍼를연마하는방법이또한제공된다.
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