公开(公告)号：WO2013092920A3

公开(公告)日：2013-10-03

申请号：PCT/EP2012076498

申请日：2012-12-20

Applicant: SWATCH GROUP RES & DEV LTD

Inventor： HESSLER THIERRY ,  DALLA PIAZZA SILVIO

IPC: G04F5/06 ,  B23K26/00 ,  B81C1/00 ,  G02B6/12 ,  G04B17/06 ,  G04B17/34 ,  G04C3/12 ,  G04G17/02

CPC classification number: H03H9/19 ,  B23K26/0057 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81C1/00595 ,  B81C2201/0143 ,  F21V17/02 ,  G04B17/066 ,  G04B17/345 ,  G04C3/12 ,  G04F5/063 ,  G04G17/02 ,  H01L41/0475 ,  H01L41/332 ,  H03H9/215

Abstract: The present invention relates to a method of fabricating a resonator in a substrate, characterized in that it comprises the following steps: a) modifying the structure of at least one zone of the substrate so as to render said at least one zone more selective; b) etching said at least zone so as to selectively fabricate said resonator.

Abstract translation: 本发明涉及一种在衬底中制造谐振器的方法，其特征在于它包括以下步骤：a）改变衬底的至少一个区域的结构，以使所述至少一个区域更具选择性; b）蚀刻所述至少一个区域以选择性地制造所述谐振器。

公开(公告)号：HK1203650A1

公开(公告)日：2015-10-30

申请号：HK15104043

申请日：2015-04-27

Applicant: SWATCH GROUP RES & DEV LTD

Inventor： HESSLER THIERRY ,  DALLA PIAZZA SILVIO

IPC: G04F20060101 ,  B81C20060101 ,  G04B20060101 ,  G04C20060101 ,  G04G20060101

Abstract: The method involves modifying a structure of a substrate zone using a laser so as to render the zone as more selective. The zone is etched so as to selectively fabricate a resonator (300) that includes a base (302) from which parallel arms (304) are extended, where each arm presents an upper face and a lower face. A recess (310) is formed on one of the faces of the arms. The resonator is released from a substrate, where the substrate is made of single-crystal material, polycrystalline material, polymer and of amorphous materials such as ceramics or glass. An independent claim is also included for a resonator.