Abstract:
Systems, methods and apparatus for designing a process to be performed at regions of an experiment library, the process involving the application of components at the library regions. Components are associated with regions of the experiment library. Each of the components represents a material or process parameter to be applied at the regions (100). A plurality o experiment stages are defined, each having one or more associated event types that are selected from predetermined eve types and define a start condition for the corresponding stage. For each of the library regions, the components are associated with one or more of the experiment stages. A plurality of component profiles are generated, which represent processes to be performed at the various regions, and which describe the application over time of one or more of the components associated with a corresponding region or regions according to the associated experiment stages (120).
Abstract:
In the methods, systems and apparatus of the present invention, a property of a fluid in a fluidic system is monitored using a sensor interfaced with the fluidic system. In some embodiments, the interfaced sensor is formed from and includes at least one sensor subassembly interfaced with an installed unit that is either a sensor or another sensor subassembly. Likewise, the systems and apparatus of the present invention comprise a sensor or a sensor subassembly. In each case, the sensor is a flexural resonator sensor. In preferred embodiments, a flexural resonator sensor comprises a flexural resonator sensing element having a sensing surface for contacting the fluid being sensed. In operation during a sensing period, the sensing surface of a flexural resonator displaces or is displaced by at least a portion of the fluid being sensed.