SEMICONDUCTOR DEVICE INCLUDING CONTACT PLUG
    2.
    发明公开

    公开(公告)号:US20230155024A1

    公开(公告)日:2023-05-18

    申请号:US17969491

    申请日:2022-10-19

    CPC classification number: H01L29/7827 H01L27/088 H01L29/4236 H01L27/108

    Abstract: A semiconductor device includes a semiconductor substrate provided with active regions, an isolation layer defining each active region on the semiconductor substrate, gate electrodes overlapping the active regions and extending in a first direction parallel to an upper surface of the semiconductor substrate, an insulating barrier structure disposed at a level higher than a level of where the gate electrodes are disposed, the insulating barrier structure having a grid pattern including grid cells, bitlines extending in a second direction perpendicular to the first direction and parallel to the upper surface of the semiconductor substrate, and disposed at a level higher than a level of where the insulating barrier structure is disposed, and first contact plugs, each first contact plug being disposed in a corresponding grid cell of the grid cells of the insulating barrier structure.

    Semiconductor devices
    3.
    发明授权

    公开(公告)号:US11037930B2

    公开(公告)日:2021-06-15

    申请号:US16670232

    申请日:2019-10-31

    Abstract: A semiconductor device includes a substrate, a bit line structure on the substrate, a contact plug structure being adjacent to the bit line structure and extending in a vertical direction perpendicular to an upper surface of the substrate, and a capacitor electrically connected to the contact plug structure. The contact plug structure includes a lower contact plug, a metal silicide pattern, and an upper contact plug that are sequentially stacked on the substrate. The metal silicide pattern has an L-shaped cross section.

    INTEGRATED CIRCUIT DEVICE
    4.
    发明公开

    公开(公告)号:US20240324183A1

    公开(公告)日:2024-09-26

    申请号:US18489034

    申请日:2023-10-18

    CPC classification number: H10B12/482 H10B12/02 H10B12/315 H10B12/485

    Abstract: An integrated circuit device includes a substrate having an active area, a plurality of bit line structures on the substrate, the plurality of bit line structures including insulating spacers on sidewalls thereof, a buried contact between the plurality of bit line structures and electrically connected to the active area, an insulation capping pattern on a bit line structure of the plurality of bit line structures, and a landing pad electrically connected to the buried contact, the landing pad arranged to vertically overlap the bit line structure on the insulation capping pattern, wherein an uppermost surface of the landing pad is higher than an uppermost surface of the insulation capping pattern, relative to the substrate.

    SEMICONDUCTOR DEVICE
    6.
    发明申请

    公开(公告)号:US20250071967A1

    公开(公告)日:2025-02-27

    申请号:US18673537

    申请日:2024-05-24

    Abstract: A semiconductor device includes a semiconductor substrate, a plurality of contact plugs spaced apart from each other on the semiconductor substrate, a plurality of first landing pads spaced apart from each other on the plurality of contact plugs, a landing insulating layer surrounding upper sidewalls of the plurality of first landing pads and covering upper portions of the plurality of first landing pads, a stopper insulating layer disposed on the landing insulating layer, and a plurality of second landing pads spaced apart from each other on the plurality of first landing pads, passing through the stopper insulating layer, and buried in landing opening holes formed in the landing insulating layer, the plurality of second landing pads being electrically and respectively connected to the plurality of first landing pads.

    SEMICONDUCTOR DEVICES
    8.
    发明公开

    公开(公告)号:US20230145857A1

    公开(公告)日:2023-05-11

    申请号:US17935119

    申请日:2022-09-25

    CPC classification number: H01L27/10814 G11C5/063

    Abstract: A semiconductor device includes a conductive contact plug disposed on a substrate, a bit line structure disposed on the conductive contact plug, first and second spacers, and a capping pattern disposed on the first and second spacers. The conductive contact plug includes a lower portion that has a first width and an upper portion that has a second width narrower than the first width. The bit line structure includes a conductive structure and an insulation structure stacked in a vertical direction. The first and second spacers are stacked on a sidewall of the lower portion of the conductive contact plug in a horizontal direction. The capping pattern covers a sidewall of the upper portion of the conductive contact plug. The first spacer directly contacts the sidewall of the lower portion of the conductive contact plug and includes air.

    Semiconductor memory device and method of fabricating the same

    公开(公告)号:US11600570B2

    公开(公告)日:2023-03-07

    申请号:US17097337

    申请日:2020-11-13

    Abstract: A semiconductor memory device is disclosed. The device may include first and second impurity regions provided in a substrate and spaced apart from each other, the second impurity region having a top surface higher than the first impurity region, a device isolation pattern interposed between the first and second impurity regions, a first contact plug, which is in contact with the first impurity region and has a bottom surface lower than the top surface of the second impurity region, a gap-fill insulating pattern interposed between the first contact plug and the second impurity region, a first protection spacer interposed between the gap-fill insulating pattern and the second impurity region, and a first spacer, which is in contact with a side surface of the first contact plug and the device isolation pattern and is interposed between the first protection spacer and the gap-fill insulating pattern.

    SEMICONDUCTOR DEVICE
    10.
    发明申请

    公开(公告)号:US20250071969A1

    公开(公告)日:2025-02-27

    申请号:US18623816

    申请日:2024-04-01

    Abstract: A semiconductor device may include a plurality of active patterns disposed on a substrate, a gate structure extending in a first direction, a bit line structure extending in a second direction, and a plurality of capacitors electrically connected to the plurality of active patterns, respectively, the plurality of active patterns having a shape extending in a third direction oblique to the first and second directions, the gate structure passing through centers of the plurality of active patterns, the bit line structure connected to first end portions of the plurality of active patterns, the plurality of capacitors connected to second end portions of the plurality of active patterns, respectively, the first end portion and the second end portion positioned at opposite sides with respect to the gate structure, and the first end portion and the second end portion having point-symmetrical shapes with respect to a center of the active pattern.

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