公开(公告)号：US10782342B2

公开(公告)日：2020-09-22

申请号：US15818736

申请日：2017-11-20

Applicant: Si-Ware Systems

Inventor： Bassam Saadany ,  Mostafa Medhat ,  Muhammad Nagi ,  Ahmed Shebl ,  Yasser M. Sabry ,  Bassem Mortada ,  Diaa Khalil

IPC: G01R31/308 ,  G01M11/00 ,  B81C99/00 ,  G01R1/07 ,  G01R31/28 ,  G02B6/42 ,  G02B26/00

Abstract: Aspects relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.

公开(公告)号：US20180143245A1

公开(公告)日：2018-05-24

申请号：US15818736

申请日：2017-11-20

Applicant: Si-Ware Systems

Inventor： Bassam Saadany ,  Mostafa Medhat ,  Muhammad Nagi ,  Ahmed Shebl ,  Yasser M. Sabry ,  Bassem Mortada ,  Diaa Khalil

IPC: G01R31/308 ,  B81C99/00 ,  G02B26/00 ,  G02B6/42 ,  G01R31/28 ,  G01R1/07

Abstract: Aspects of the disclosure relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.