公开(公告)号：EP1090421A1

公开(公告)日：2001-04-11

申请号：EP99926612.5

申请日：1999-06-15

Applicant: Surface Technology Systems Limited

Inventor： THOMAS, Tudor Norman ,  WILLIAMS, Robert John

IPC: H01L21/68

CPC classification number: H01L21/6833

Abstract: There is provided a method of dechucking from an electrostatic chuck a substrate held by one or more residual forces to the chuck, the method comprising the steps of: (a) reducing a residual chucking force due to the electrostatic chuck polarisation; (b) contracting the chuck with the substrate attached thereto with a plasma for a time sufficient substantially to remove any residual charge from the surface of the substrate and the chuck; and (c) subsequently to, or simultaneously with, step (b) removing the substrate from the chuck. Also disclosed is an apparatus for performing the method.