公开(公告)号：US20030224105A1

公开(公告)日：2003-12-04

申请号：US10158375

申请日：2002-05-30

Applicant: Symyx Technologies, Inc.

Inventor： Konstantinos Chondroudis ,  C. Eric Ramberg ,  Martin Devenney ,  Keith Cendak ,  Sum Nguyen ,  Qun Fan ,  Xuejun Wang

IPC: B05D003/12

CPC classification number: B05D1/002 ,  B01J19/0046 ,  B01J2219/0036 ,  B01J2219/00364 ,  B01J2219/00387 ,  B01J2219/00443 ,  B01J2219/00536 ,  B01J2219/00659 ,  B01J2219/00691 ,  B01J2219/00745 ,  B01J2219/00747 ,  B01J2219/00756 ,  B05B12/14 ,  B05C11/08 ,  B05D3/02 ,  C40B30/08 ,  C40B40/18 ,  C40B60/14

Abstract: In a method and apparatus for forming a plurality of films on the surface of a substrate, at least two liquid samples are deposited by a deposition device onto the substrate surface. The substrate is moved so that the liquid samples on the substrate are subjected to a non-contact spreading force sufficient to cause the samples to spread over the surface to form a respective film thereon. At least a portion of each film is discrete from one or more other films formed on each substrate surface. In another embodiment, liquid samples of different compositions are deposited on an array of substrates. The liquid samples on at least two of the substrates are subjected to non-contact spreading forces during overlapping durations of time whereby the spreading forces are sufficient to cause the samples to spread over respective surfaces of the substrates to form films thereon.

Abstract translation: 在用于在衬底的表面上形成多个膜的方法和装置中，至少两个液体样品通过沉积装置沉积到衬底表面上。 衬底移动，使得衬底上的液体样品经受足够的非接触扩展力，使得样品在表面上扩散以在其上形成各自的膜。 每个膜的至少一部分与形成在每个衬底表面上的一个或多个其它膜分离。 在另一个实施方案中，不同组成的液体样品沉积在基底阵列上。 至少两个基板上的液体样品在重复的时间期间经受非接触扩展力，由此扩展力足以使样品在基板的相应表面上分散以在其上形成薄膜。