公开(公告)号：FI20115151A

公开(公告)日：2012-08-18

申请号：FI20115151

申请日：2011-02-17

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： PENSALA TUOMAS ,  JAAKKOLA ANTTI ,  GANCHENKOVA MARIA ,  PRUNNILA MIKA ,  KIIHAMAEKI JYRKI

IPC: H03H9/02 ,  B81B3/00 ,  H03H3/007

公开(公告)号：FI20115151A0

公开(公告)日：2011-02-17

申请号：FI20115151

申请日：2011-02-17

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

Inventor： PENSALA TUOMAS ,  JAAKKOLA ANTTI ,  GANCHENKOVA MARIA ,  PRUNNILA MIKA ,  KIIHAMAEKI JYRKI

IPC: H01L20060101

Abstract: The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.

公开(公告)号：EP2603975A4

公开(公告)日：2013-08-21

申请号：EP11816146

申请日：2011-08-11

Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT

Inventor： JAAKKOLA ANTTI ,  PENSALA TUOMAS ,  KIIHAMAEKI JYRKI

IPC: H03H3/007 ,  H03H9/02 ,  H03H9/24 ,  H03H9/50

CPC classification number: H03H3/0072 ,  H03H3/0076 ,  H03H9/02448 ,  H03H9/2463 ,  H03H9/505 ,  H03H2009/02385 ,  H03H2009/02503 ,  H03H2009/2442