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1.发明专利
公开(公告)号：AU5434696A
公开(公告)日：1996-10-16
申请号：AU5434696
申请日：1996-03-28
Applicant: TENCOR INSTRUMENTS
Inventor： JOHNSON RALPH , WELLS KEITH , GALBRAITH LEE K
Abstract: Light scattered from illuminated spot on a patterned wafer is first passed through a di-electric filter and then by an optical fiber bundle to a detector. The di-electric filter controls the aperture of the light that is passed to a desired azimuth angle and the optical fiber further limits the aperture.
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