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公开(公告)号：JPS5898941A
公开(公告)日：1983-06-13
申请号：JP19174882
申请日：1982-10-28
Applicant: TENCOR INSTRUMENTS
Inventor： UIRIAMU AARU FUIIRA
IPC: H01L21/677 , B25B11/00 , H01L21/683
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