公开(公告)号：US20230246630A1

公开(公告)日：2023-08-03

申请号：US17589465

申请日：2022-01-31

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Keegan Shaun MARTIN ,  Ricky A. JACKSON ,  Ting-Ta YEN ,  Huiyao CHEN

IPC: H03H9/17 ,  H01L41/047

CPC classification number: H03H9/17 ,  H01L41/047 ,  H03H9/131

Abstract: In some examples, a device includes a substrate, an oxide layer, and a resonator structure. The substrate is configured in a released-resonator architecture. The substrate has a first surface that is a roughened first surface and a second surface opposite to the first surface. The second surface exposed to a cavity of the released-resonator architecture.

公开(公告)号：US20220123715A1

公开(公告)日：2022-04-21

申请号：US17345644

申请日：2021-06-11

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Keegan Shaun MARTIN ,  Ting-Ta YEN

IPC: H03H9/08 ,  H03H3/04 ,  H03H9/02 ,  H03H9/17

Abstract: An acoustic-wave device includes a first electrode located over a substrate. A piezoelectric film is located over the first electrode and at least partially overlaps the first electrode. A second electrode is located over the piezoelectric film and at least partially overlaps the first electrode and the piezoelectric film. A temperature sensor is located in a same layer level as the first or second electrode. A heater may also be located in a same layer level as the first electrode. A closed-loop system may operate using the temperature sensor and the heater to maintain an operating temperature that provides highly stable operation.