公开(公告)号：US20230246630A1

公开(公告)日：2023-08-03

申请号：US17589465

申请日：2022-01-31

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Keegan Shaun MARTIN ,  Ricky A. JACKSON ,  Ting-Ta YEN ,  Huiyao CHEN

IPC: H03H9/17 ,  H01L41/047

CPC classification number: H03H9/17 ,  H01L41/047 ,  H03H9/131

Abstract: In some examples, a device includes a substrate, an oxide layer, and a resonator structure. The substrate is configured in a released-resonator architecture. The substrate has a first surface that is a roughened first surface and a second surface opposite to the first surface. The second surface exposed to a cavity of the released-resonator architecture.