公开(公告)号：EP0596711B1

公开(公告)日：1998-01-21

申请号：EP93308772.8

申请日：1993-11-03

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Shukla, Vishwa N. ,  Padovani, Francois A. ,  Lukasiewicz, Stanley J.

IPC: G01L9/12 ,  G01L9/00

CPC classification number: G01L9/0075 ,  Y10T29/435

公开(公告)号：EP0596711A2

公开(公告)日：1994-05-11

申请号：EP93308772.8

申请日：1993-11-03

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Shukla, Vishwa N. ,  Padovani, Francois A. ,  Lukasiewicz, Stanley J.

IPC: G01L9/12 ,  G01L9/00

CPC classification number: G01L9/0075 ,  Y10T29/435

Abstract: A monolithic capacitive pressure transducer is shown composed of ceramic material having a closed cavity formed near a surface thereof and having capacitor plates formed on two opposed surfaces defining the cavity. Vias are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm and a base having a recess in the top surface using ceramic powder coated with an organic binder. A metal layer is deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then debinderized by heating in air to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature in a reducing atmosphere to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.

Abstract translation: 单片电容式压力传感器由陶瓷材料组成，该陶瓷材料在其表面附近形成有封闭的空腔，并且具有形成在限定空腔的两个相对的表面上的电容器板。 通孔形成为从电容器板延伸以允许与其电连接。 传感器通过在压力下分开地形成隔膜和在顶表面上具有凹陷的基底，其中使用涂覆有机粘合剂的陶瓷粉末。 金属层沉积在两片上，然后将片连接在一起以形成单个单元。 间隔件可以插入凹部中以确保在接合操作期间在两个部件之间保持预定的间隙。 然后通过在空气中加热至第一温度水平来使部件脱粘，以允许粘合剂有机物以及间隔器有机物，如果使用间隔物，则通过隔膜和基底的开孔气化和/或分解和去除 。 然后将该单元升温至还原气氛中的烧结温度以将其改变成单体，并将金属化层转化为与陶瓷结合的导电层。

公开(公告)号：EP0317163B1

公开(公告)日：1994-02-02

申请号：EP88310524.9

申请日：1988-11-09

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Lukasiewicz, Stanley J. ,  Cooper, Lawrence E. ,  Anastasia, Charles M. ,  Pestana, Gregg W.

IPC: G01L23/10

CPC classification number: G01L23/10 ,  G01L9/008

公开(公告)号：EP0317163A3

公开(公告)日：1991-04-17

申请号：EP88310524.9

申请日：1988-11-09

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Lukasiewicz, Stanley J. ,  Cooper, Lawrence E. ,  Anastasia, Charles M. ,  Pestana, Gregg W.

IPC: G01L23/10

CPC classification number: G01L23/10 ,  G01L9/008

Abstract: A pressure sensor for providing an electrical signal corresponding to pressure in a cylinder of an automotive engine has a rigid load-spreading element rigidly secured to a first surface of a ceramic piezoelectric body by a rigid bonding material precisely conformed to the first surface to be in substantially uniform load-transferring relation to all parts of the first body surface, has a rigid support member rigidly secured to a parallel, opposite surface of the ceramic piezoelectric body by a rigid bonding material precisely conformed to the opposite surface to be in substantially uniform load-transferring relation to all parts of the opposite body surface to form a piezoelectric unit, and has a peripheral part of the rigid support member precisely mounted with an interference fit in a bore in a metal component of a mounting structure so that the body of piezoelectric material and the load-spreading element extend in cantilever relation at a precisely determined location to be engaged by force applied through a diaphragm in response to an applied pressure to provide an electrical signal precisely corresponding to the pressure.

公开(公告)号：EP0317163A2

公开(公告)日：1989-05-24

申请号：EP88310524.9

申请日：1988-11-09

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Lukasiewicz, Stanley J. ,  Cooper, Lawrence E. ,  Anastasia, Charles M. ,  Pestana, Gregg W.

IPC: G01L23/10

CPC classification number: G01L23/10 ,  G01L9/008

Abstract: A pressure sensor for providing an electrical signal corresponding to pressure in a cylinder of an automotive engine has a rigid load-spreading element rigidly secured to a first surface of a ceramic piezoelectric body by a rigid bonding material precisely conformed to the first surface to be in substantially uniform load-transferring relation to all parts of the first body surface, has a rigid support member rigidly secured to a parallel, opposite surface of the ceramic piezoelectric body by a rigid bonding material precisely conformed to the opposite surface to be in substantially uniform load-transferring relation to all parts of the opposite body surface to form a piezoelectric unit, and has a peripheral part of the rigid support member precisely mounted with an interference fit in a bore in a metal component of a mounting structure so that the body of piezoelectric material and the load-spreading element extend in cantilever relation at a precisely determined location to be engaged by force applied through a diaphragm in response to an applied pressure to provide an electrical signal precisely corresponding to the pressure.

Abstract translation: 用于提供与汽车发动机气缸中的压力相对应的电信号的压力传感器具有通过刚性接合材料刚性地固定到陶瓷压电体的第一表面的刚性负载传播元件， 与第一体表的所有部分基本上均匀的载荷传递关系具有刚性支撑构件，刚性支撑构件通过刚性接合材料刚性地固定到陶瓷压电体的平行相对表面，该刚性粘合材料精确地与相对表面基本均匀地承载 与相对体表的所有部分的转移关系形成压电单元，并且刚性支撑构件的周边部分精确地安装成与安装结构的金属部件中的孔中的过盈配合，使得压电体 材料和负载扩展元件在精确确定的位置处以悬臂关系延伸以进行接合 d通过响应于施加的压力通过隔膜施加的力，以提供精确对应于压力的电信号。

公开(公告)号：EP1211497A3

公开(公告)日：2005-07-20

申请号：EP01309749.8

申请日：2001-11-20

Applicant: Texas Instruments Incorporated

Inventor： Frackelton, Peter H. ,  Lukasiewicz, Stanley J.

IPC: G01L9/00

CPC classification number: G01L9/0075 ,  G01L19/14

Abstract: A fluid pressure sensor (10) has a generally polyhedron configured capacitive transducer (18) electrically connected to a flexible circuit using interference fit U-shaped edge connectors (20). The flexible circuit (16) is received in an electronics chamber formed in a top end of a base member (12) with the corners of the transducer disposed on the face surface (12f) of the top. A cover (24) is formed with a circular fluid pressure opening (24a) through which a sealing gasket (22) extends, the gasket having tabs (22a) received in a seat (24c) formed in the bottom surface of the top wall (24b) of the cover. A transducer receiving seat (24d) is also formed in the bottom surface of the cover for placement of transducer (18). The cover is formed with opposing legs (24h) which interfit with notches (12d) in the base and a third leg (24n) slidingly received in a slot formed in the base through which conductive tails (16h) of the flexible circuit (16) extend for electrical engagement with a hexport (26) slidingly received over the cover and top portion of the base member.

公开(公告)号：EP1211497A2

公开(公告)日：2002-06-05

申请号：EP01309749.8

申请日：2001-11-20

Applicant: Texas Instruments Incorporated

Inventor： Frackelton, Peter H. ,  Lukasiewicz, Stanley J.

IPC: G01L9/12

CPC classification number: G01L9/0075 ,  G01L19/14

Abstract: A fluid pressure sensor (10) has a generally polyhedron configured capacitive transducer (18) electrically connected to a flexible circuit using interference fit U-shaped edge connectors (20). The flexible circuit (16) is received in an electronics chamber formed in a top end of a base member (12) with the corners of the transducer disposed on the face surface (12f) of the top. A cover (24) is formed with a circular fluid pressure opening (24a) through which a sealing gasket (22) extends, the gasket having tabs (22a) received in a seat (24c) formed in the bottom surface of the top wall (24b) of the cover. A transducer receiving seat (24d) is also formed in the bottom surface of the cover for placement of transducer (18). The cover is formed with opposing legs (24h) which interfit with notches (12d) in the base and a third leg (24n) slidingly received in a slot formed in the base through which conductive tails (16h) of the flexible circuit (16) extend for electrical engagement with a hexport (26) slidingly received over the cover and top portion of the base member.

Abstract translation: 流体压力传感器（10）具有使用过盈配合U形边缘连接器（20）电连接到柔性电路的大体上多面体配置的电容换能器（18）。 柔性电路（16）被容纳在形成在基部构件（12）的顶端的电子室中，其中换能器的角部设置在顶部的表面（12f）上。 盖（24）形成有圆形流体压力开口（24a），密封垫圈（22）延伸穿过该密封垫圈，垫圈具有接纳在形成在顶壁的底表面中的座位（24c）中的突片（22a） 24b）。 传感器接收座（24d）也形成在盖的底表面中以放置换能器（18）。 所述盖形成有与所述基座中的凹口（12d）相配合的相对的腿部（24h），以及滑动地容纳在形成在所述基部中的槽中的第三腿部（24n），所述柔性电路（16）的导电尾部（16h） 延伸以与滑动地容纳在盖的顶部和基部构件上的六端口（26）电接合。

公开(公告)号：EP0596711A3

公开(公告)日：1994-08-17

申请号：EP93308772.8

申请日：1993-11-03

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Shukla, Vishwa N. ,  Padovani, Francois A. ,  Lukasiewicz, Stanley J.

IPC: G01L9/12 ,  G01L9/00

CPC classification number: G01L9/0075 ,  Y10T29/435

Abstract: A monolithic capacitive pressure transducer is shown composed of ceramic material having a closed cavity formed near a surface thereof and having capacitor plates formed on two opposed surfaces defining the cavity. Vias are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm and a base having a recess in the top surface using ceramic powder coated with an organic binder. A metal layer is deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then debinderized by heating in air to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature in a reducing atmosphere to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.