公开(公告)号：EP0596711B1

公开(公告)日：1998-01-21

申请号：EP93308772.8

申请日：1993-11-03

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Shukla, Vishwa N. ,  Padovani, Francois A. ,  Lukasiewicz, Stanley J.

IPC: G01L9/12 ,  G01L9/00

CPC classification number: G01L9/0075 ,  Y10T29/435

公开(公告)号：EP0596711A2

公开(公告)日：1994-05-11

申请号：EP93308772.8

申请日：1993-11-03

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Shukla, Vishwa N. ,  Padovani, Francois A. ,  Lukasiewicz, Stanley J.

IPC: G01L9/12 ,  G01L9/00

CPC classification number: G01L9/0075 ,  Y10T29/435

Abstract: A monolithic capacitive pressure transducer is shown composed of ceramic material having a closed cavity formed near a surface thereof and having capacitor plates formed on two opposed surfaces defining the cavity. Vias are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm and a base having a recess in the top surface using ceramic powder coated with an organic binder. A metal layer is deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then debinderized by heating in air to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature in a reducing atmosphere to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.

Abstract translation: 单片电容式压力传感器由陶瓷材料组成，该陶瓷材料在其表面附近形成有封闭的空腔，并且具有形成在限定空腔的两个相对的表面上的电容器板。 通孔形成为从电容器板延伸以允许与其电连接。 传感器通过在压力下分开地形成隔膜和在顶表面上具有凹陷的基底，其中使用涂覆有机粘合剂的陶瓷粉末。 金属层沉积在两片上，然后将片连接在一起以形成单个单元。 间隔件可以插入凹部中以确保在接合操作期间在两个部件之间保持预定的间隙。 然后通过在空气中加热至第一温度水平来使部件脱粘，以允许粘合剂有机物以及间隔器有机物，如果使用间隔物，则通过隔膜和基底的开孔气化和/或分解和去除 。 然后将该单元升温至还原气氛中的烧结温度以将其改变成单体，并将金属化层转化为与陶瓷结合的导电层。

公开(公告)号：EP0596711A3

公开(公告)日：1994-08-17

申请号：EP93308772.8

申请日：1993-11-03

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Shukla, Vishwa N. ,  Padovani, Francois A. ,  Lukasiewicz, Stanley J.

IPC: G01L9/12 ,  G01L9/00

CPC classification number: G01L9/0075 ,  Y10T29/435

Abstract: A monolithic capacitive pressure transducer is shown composed of ceramic material having a closed cavity formed near a surface thereof and having capacitor plates formed on two opposed surfaces defining the cavity. Vias are formed extending from the capacitor plates to permit electrical connection therewith. The transducer is made by separately forming under pressure a diaphragm and a base having a recess in the top surface using ceramic powder coated with an organic binder. A metal layer is deposited on the two pieces and the pieces are then joined together to form a single unit. A spacer may be inserted in the recess to ensure that a predetermined gap is maintained between the two parts during the joining operation. The parts are then debinderized by heating in air to a first temperature level to allow the binder organics, as well as the spacer organics if a spacer is employed, to be vaporized and/or decomposed and removed through the open pores of the diaphragm and base. The unit is then brought up to a sintering temperature in a reducing atmosphere to change it into a monolithic body and to convert the metallized layer into a conductive layer bonded to the ceramic.