公开(公告)号：WO1989008244A1

公开(公告)日：1989-09-08

申请号：PCT/US1989000823

申请日：1989-03-03

Applicant: THE FOXBORO COMPANY

Inventor： THE FOXBORO COMPANY ,  KOEN, Edward, F. ,  TASKER, Richard

IPC: G01L09/00

CPC classification number: G01L19/003 ,  G01L19/0084 ,  G01L19/0627 ,  G01L19/0645 ,  G01L19/147

Abstract: A solid state measured sensor (10) is described in which the pressure sensor element (14) is protected from the measurand by a combination of a pressure transfer medium (31) and a thin covering membrane (32). A method is described for forming the diaphragm in situ. The membrane material is selected from a group of materials which includes fluorosilicone, so as to substantially avoid entrapment of air or formation of voids in the pressure transfer medium (31) such as would degrade the performance of the sensor (10). The pressure transfer medium (31) is a gel-like material such as dimethyl silicone and equivalents. Alternatively, the gel may be fluorosilicone and the diaphragm may be dimethyl silicone. The membrane material is chosen to be substantially impermeable to the ambients or process media being measured and also flexible, is to be poured and cured in place on the assembly during fabrication .

Abstract translation: 描述了固态测量传感器（10），其中通过压力传递介质（31）和薄覆盖膜（32）的组合来保护压力传感器元件（14）免受被测量。 描述了用于在原位形成隔膜的方法。 膜材料选自包含氟硅氧烷的一组材料，以便基本上避免空气的夹带或在压力传递介质（31）中形成空隙，例如会降低传感器（10）的性能。 压力传递介质（31）是诸如二甲基硅氧烷和等同物的凝胶状材料。 或者，凝胶可以是氟硅氧烷，并且隔膜可以是二甲基硅氧烷。 膜材料被选择为对被测量的环境或加工介质基本上不可渗透，并且也是柔性的，在制造期间将其倾倒并固化在组件上的适当位置。

公开(公告)号：EP0400074A1

公开(公告)日：1990-12-05

申请号：EP89903349.0

申请日：1989-03-03

Applicant: THE FOXBORO COMPANY

Inventor： KOEN, Edward, F. ,  TASKER, Richard

IPC: G01L9 ,  G01L19

CPC classification number: G01L19/003 ,  G01L19/0084 ,  G01L19/0627 ,  G01L19/0645 ,  G01L19/147

Abstract: On a mis au point un capteur de mesure à semiconducteurs (10) dans lequel l'élément de capteur de pression (14) est protégé du milieu à mesurer par un milieu de transfert de pression (31) et par une fine membrane de couverture (32) combinés. On a mis au point un procédé permettant de former le diaphragme in situ. Le matériau de la membrane est choisi dans un groupe de matériaux comprenant la fluorosilicone, de manière à éviter le piégeage d'air ou la formation de vides dans le milieu de transfert de pression (31), ce qui a pour effet de diminuer l'efficacité du capteur (10). Le milieu de transfert de pression (31) est une matière analogue à un gel tel que la silicone de diméthyle et équivalents. Dans un autre mode de réalisation, le gel peut être de la fluorosilicone et le diaphragme de la silicone de diméthyle. On choisit le matériau de la membrane pour qu'il soit sensiblement imperméable aux éléments ambiants ou aux milieux de traitement mesurés, et aussi souple, lequel est versé et polymérisé en place sur l'ensemble pendant la fabrication.

公开(公告)号：EP0400074B1

公开(公告)日：1994-09-28

申请号：EP89903349.2

申请日：1989-03-03

Applicant: THE FOXBORO COMPANY

Inventor： KOEN, Edward, F. ,  TASKER, Richard

IPC: G01L9/00 ,  H01G7/00

CPC classification number: G01L19/003 ,  G01L19/0084 ,  G01L19/0627 ,  G01L19/0645 ,  G01L19/147

Abstract: A solid state measured sensor (10) is described in which the pressure sensor element (14) is protected from the measurand by a combination of a pressure transfer medium (31) and a thin covering membrane (32). A method is described for forming the diaphragm in situ. The membrane material is selected from a group of materials which includes fluorosilicone, so as to substantially avoid entrapment of air or formation of voids in the pressure transfer medium (31) such as would degrade the performance of the sensor (10). The pressure transfer medium (31) is a gel-like material such as dimethyl silicone and equivalents. Alternatively, the gel may be fluorosilicone and the diaphragm may be dimethyl silicone. The membrane material is chosen to be substantially impermeable to the ambients or process media being measured and also flexible, is to be poured and cured in place on the assembly during fabrication .