公开(公告)号：US11264461B2

公开(公告)日：2022-03-01

申请号：US16648242

申请日：2019-02-28

Applicant: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES

Inventor： Weier Lu ,  Yang Xia ,  Lili Zhao ,  Nan Li

IPC: H01L29/16 ,  C01B32/194 ,  B32B37/00

Abstract: Disclosed is a graphene electrochemical transfer method assisted by multiple supporting films, comprising: (1) growing graphene on a substrate, and then spin-coating a thin layer of photoresist on a surface of the graphene as a first film; (2) spin-coating n layers of thick, tough, and selectively dissolvable polymer films on the surface of the first film as an top film; (3) dissociating the multi-layer composite film and the graphene from the surface of the substrate by an electrochemical process, and dissolving the thick polymer films which is the top film with a first solvent; (4) after cleaning, transferring the thin first film and the graphene to a target substrate, and finally dissolving the thin first film away with a second solvent to complete the transfer process. This transfer process is fast, stable, and capable of transferring a large-size graphene, which may promote the large-scale application of graphene.

公开(公告)号：US20140334209A1

公开(公告)日：2014-11-13

申请号：US14361613

申请日：2012-09-27

Applicant: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES

Inventor： Yongtao Li ,  Zhangyan Zhao ,  Wei Qin ,  Yingjie Li ,  Yang Xia

IPC: H02M7/06

CPC classification number: H02M7/066 ,  G01R27/00 ,  G01R31/00 ,  H01J37/32082 ,  H01J37/32174 ,  H01J37/32935 ,  H03F3/195 ,  H03F3/45475 ,  H03F2203/45138 ,  H03F2203/45518 ,  H03F2203/45528 ,  H04B17/00

Abstract: A radio frequency (RF) power source having a precise power detector includes a RF signal generator, a RF power amplifying circuit, a power supply circuit, and a precise power detector. The precise power detector includes a voltage mutual inductor, a current mutual inductor, a precise detecting module, and a microcontroller integrated with an analog-digital (A/D) converter and a micro-processing unit, wherein the voltage mutual inductor and the current mutual inductor are respectively connected with the precise detecting module. The precise detecting module includes an add circuit, a subtraction circuit, a rectification circuit, and a filtering-amplifying circuit, wherein the add circuit and the subtraction circuit are respectively connected with the rectification circuit, the rectification circuit connects to the filtering-amplifying circuit, the filtering-amplifying circuit connects to the microcontroller integrated with the A/D converter and the micro-processing unit.

Abstract translation: 具有精确功率检测器的射频（RF）电源包括RF信号发生器，RF功率放大电路，电源电路和精确功率检测器。 精密功率检测器包括电压互感器，电流互感器，精确检测模块和与模拟数字（A / D）转换器和微处理单元集成的微控制器，其中电压互感器和电流 互感器分别与精密检测模块相连。 精密检测模块包括加法电路，减法电路，整流电路和滤波放大电路，其中加法电路和减法电路分别与整流电路连接，整流电路连接到滤波放大电路 滤波放大电路连接到与A / D转换器和微处理器集成的微控制器。

公开(公告)号：US09515567B2

公开(公告)日：2016-12-06

申请号：US14361613

申请日：2012-09-27

Applicant: THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES

Inventor： Yongtao Li ,  Zhangyan Zhao ,  Wei Qin ,  Yingjie Li ,  Yang Xia

IPC: H04B17/00 ,  G01R31/00 ,  G01R27/00 ,  H02M7/66 ,  H01J37/32 ,  H02M7/06 ,  H03F3/195 ,  H03F3/45

CPC classification number: H02M7/066 ,  G01R27/00 ,  G01R31/00 ,  H01J37/32082 ,  H01J37/32174 ,  H01J37/32935 ,  H03F3/195 ,  H03F3/45475 ,  H03F2203/45138 ,  H03F2203/45518 ,  H03F2203/45528 ,  H04B17/00

Abstract: A radio frequency (RF) power source having a precise power detector includes a RF signal generator, a RF power amplifying circuit, a power supply circuit, and a precise power detector. The precise power detector includes a voltage mutual inductor, a current mutual inductor, a precise detecting module, and a microcontroller integrated with an analog-digital (A/D) converter and a micro-processing unit, wherein the voltage mutual inductor and the current mutual inductor are respectively connected with the precise detecting module. The precise detecting module includes an add circuit, a subtraction circuit, a rectification circuit, and a filtering-amplifying circuit, wherein the add circuit and the subtraction circuit are respectively connected with the rectification circuit, the rectification circuit connects to the filtering-amplifying circuit, the filtering-amplifying circuit connects to the microcontroller integrated with the A/D converter and the micro-processing unit.

Abstract translation: 具有精确功率检测器的射频（RF）电源包括RF信号发生器，RF功率放大电路，电源电路和精确功率检测器。 精密功率检测器包括电压互感器，电流互感器，精确检测模块和与模拟数字（A / D）转换器和微处理单元集成的微控制器，其中电压互感器和电流 互感器分别与精密检测模块相连。 精密检测模块包括加法电路，减法电路，整流电路和滤波放大电路，其中加法电路和减法电路分别与整流电路连接，整流电路连接到滤波放大电路 滤波放大电路连接到与A / D转换器和微处理器集成的微控制器。