公开(公告)号：WO2016058037A1

公开(公告)日：2016-04-21

申请号：PCT/AU2015/000625

申请日：2015-10-15

Applicant: THE UNIVERSITY OF MELBOURNE

Inventor： PIRACHA, Afaq Habib ,  PRAWER, Steven ,  GANESAN, Kumaravelu ,  TOMLJENOVIC-HANIC, Snjezana ,  LAU, Desmond

IPC: C30B25/04 ,  C30B29/04 ,  C23C16/27

CPC classification number: C30B25/20 ,  B23K26/0006 ,  B23K26/362 ,  B23K2203/50 ,  B81C3/001 ,  B81C2201/0143 ,  B81C2201/0146 ,  B81C2201/0187 ,  B81C2201/0198 ,  C23C16/042 ,  C23C16/274 ,  C23C16/279 ,  C23C16/4408 ,  C23C16/56 ,  C25F3/02 ,  C30B25/04 ,  C30B25/18 ,  C30B29/04 ,  C30B33/10 ,  C30B33/12

Abstract: The present disclosure provides a method of fabricating a diamond membrane. The method comprises providing a substrate and a support structure. The substrate comprises a diamond material having a first surface and the substrate further comprises a sub-surface layer that is positioned below the first surface and has a crystallographic structure that is different to that of the diamond material. The sub-surface layer is positioned to divide the diamond material into first and second regions wherein the first region is positioned between the first surface and the sub-surface layer. The support structure also comprises a diamond material and is connected to, and covers a portion of, the first surface of the substrate. The method further comprises selectively removing the second region of the diamond material from the substrate by etching away at least a portion of the sub-surface layer of the substrate.

Abstract translation: 本公开提供了制造金刚石膜的方法。 该方法包括提供基底和支撑结构。 衬底包括具有第一表面的金刚石材料，并且衬底还包括位于第一表面下方并具有不同于金刚石材料的晶体结构的次表面层。 子表面层被定位成将金刚石材料分成第一和第二区域，其中第一区域位于第一表面和子表面层之间。 支撑结构还包括金刚石材料并且连接到衬底的第一表面并且覆盖衬底的第一表面的一部分。 该方法还包括通过蚀刻除去衬底的次表面层的至少一部分来从衬底选择性地去除金刚石材料的第二区域。