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公开(公告)号：SG35015A1
公开(公告)日：1997-02-01
申请号：SG1995001353
申请日：1995-09-13
Applicant: TOKUYAMA CORP
Inventor： OKOSHI HIDEKI , MIYAHARA KENICHIRO , MAEDA MASAKATSU , KATO YUKA
IPC: C09J7/00 , H01L23/10 , H01L23/495
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