公开(公告)号：JP2003094393A

公开(公告)日：2003-04-03

申请号：JP2001290797

申请日：2001-09-25

Applicant: TORAY INDUSTRIES

Inventor： KUBO YOSHIHIKO ,  NAKAMURA YASUHIRO ,  FURUSHO KAZUHIKO

IPC: G02F1/13 ,  B26F3/00 ,  B28D5/00 ,  C03B33/027 ,  C03B33/037 ,  C03B33/07 ,  C03B33/10 ,  G02F1/1333

Abstract: PROBLEM TO BE SOLVED: To provide a method and device capable of improving on the yield of the substrate cutting process in the manufacture of display devices. SOLUTION: The cutting method and device are applicable to the cutting of substrates by scribing, wherein the cutter pressure varies according to the given value of the accumulated processing distance of the scribing cutter.

公开(公告)号：JP2000011467A

公开(公告)日：2000-01-14

申请号：JP18190398

申请日：1998-06-29

Applicant: TORAY INDUSTRIES

Inventor： KUBO YOSHIHIKO ,  MINAMI TOSHIYUKI

IPC: G11B7/26

Abstract: PROBLEM TO BE SOLVED: To improve the cleanliness of a supporting body for transportation and to enhance quality by introducing gas through a perforated plate, thereby minimizing the splashing of the foreign matter in a chamber at the time of treating the optical recording medium substrates mounted at the supporting body for transportation in a reduced pressure atmosphere and returning the reduced pressure atmosphere to an atm. pressure before or after the treatment. SOLUTION: The substrates 3 of the plural optical recording media are mounted at a rotatable and revolvable rotating and revolving mechanism 2 of a tray 1 and the tray 1 is transported to a preevacuating chamber and a degassing and drying chamber where the substrates 3 are subjected to preevacuating and vacuum drying. Gaseous nitrogen is blown out of a purging nozzle 16 into the preevacuating chamber and a take-out chamber to restore the atm. pressure in the chamber 15 at the time of carrying in and carrying out of the tray 1. The perforated plate 17 formed by boring a stainless steel plate with many holes is disposed right below the purging nozzle 16, i.e., in the gas introducing route to the chamber 15. As a result, the velocity of the flow of the discharging gas from the purging nozzle 16 is lowered and flow regulation is effectively executed. The cleaning of the tray 1 and the inside of the chamber 15 is thus made possible.

公开(公告)号：JP2000011466A

公开(公告)日：2000-01-14

申请号：JP16975598

申请日：1998-06-17

Applicant: TORAY INDUSTRIES

Inventor： KIRIYAMA YOSHIYUKI ,  NAKANISHI TOSHIHARU ,  KUBO YOSHIHIKO

IPC: G11B7/26

Abstract: PROBLEM TO BE SOLVED: To improve productivity and to ameliorate the mechanical characteristics, such as warpage, tilt and acceleration, of an optical recording medium after sputtering with a simple process by using a porous member consisting of ceramics in constituting the section of a holder for holding the substrate of the optical recording medium at the time of sputtering, which section comes into contact with the substrate. SOLUTION: A holder 4 holds the substrate 1 of the optical recording medium 1 of