公开(公告)号：JPH11218466A

公开(公告)日：1999-08-10

申请号：JP2312998

申请日：1998-02-04

Applicant: TORAY INDUSTRIES

Inventor： SASAMOTO HIROKAZU ,  IDO HIDEO ,  HIRATA HAJIME

IPC: G01B11/02 ,  G01M11/00 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a measuring device of a substrate of excellent precision and reproducibility for shortening a measuring time and the production method of a color filter or a transparent electrode substrate. SOLUTION: The measuring device of a substrate judges the presence of a projection-like matter set on at least one substrate constituting a liquid crystal element sandwiching the liquid crystal composition between a pair of opposite substrates. A stage 2 mounting a sample, a height measuring means 3 or an imaging means and a data processor 5 are provided, and the presence of the projection-like matter is judged from height information obtained from the height measuring means 3 and intensity information obtained from the imaging means.