公开(公告)号：JP2000231871A

公开(公告)日：2000-08-22

申请号：JP2000020291

申请日：2000-01-28

Applicant: TOSHIBA CORP

Inventor： SAKAI TADASHI ,  NAKAYAMA KAZUYA ,  CHO TOSHI ,  GEHAN A J AMARATOUNGA ,  AI ALEXANDRO ,  MARK BAXANDALL ,  N RUPASHINGU

IPC: C23C14/06 ,  H01J1/30 ,  H01J1/304 ,  H01J9/02

Abstract: PROBLEM TO BE SOLVED: To provide an electron emitting film excellent in electron emission, in mechanical strength, and in work characteristics, and provide a field emission type cold cathode device using the same electron emitting film. SOLUTION: This electron emitting film is made up of a matrix basically composed of amorphous carbon and fullerene structure basically composed of a two-dimensional train of six-membered rings of carbon. The fullerene structure is dispersed in the matrix and partly projects from the matrix. The weight ratio of the amorphous carbon to the fullerene structure ranges from 50:50 to 5:95. The amorphous carbon contains nitrogen having a concentration of about 1×1015 cm3 to 10 atomic % that acts as a donor.