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公开(公告)号：JPH01172430A
公开(公告)日：1989-07-07
申请号：JP33293787
申请日：1987-12-28
Applicant: TOSOH CORP
Inventor： ONO HIDEKI , UCHIKURA MASAKI , HASEBE YOSHIO
Abstract: PURPOSE:To improve film thickness uniformity, transparency and durability, by forming a polyvinyl acetal film by using a specified aliph. ketone as a film- forming solvent. CONSTITUTION:A polyvinyl acetal (A) having an average MW of 10,000-200,000 of formula I [wherein R is 1-3C linear or branched alkyl; content y of vinyl acetate component is 10mol.% or less; degree of acetalation Z/(x+y+z) is 60mol.% or higher] is obtd. by reacting polyvinyl alcohol (a) and an aldehyde (b) in the presence of an acid catalyst (c) in water or an alcohol. A soln. obtd. by dissolving 5-20wt.% component A in a film-forming solvent (B) which is an aliph. ketone having a b.p. of 110-170 deg.C of formula II or III (e.g., 4-methyl-2- pentanone) is flow-cast on a base material (e.g., silicon wafer) to obtain a pellicular film having a thickness of 0.5-10mum by evaporating the component B.
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公开(公告)号：JPH01166045A
公开(公告)日：1989-06-29
申请号：JP32453387
申请日：1987-12-22
Applicant: TOSOH CORP
Inventor： HASEBE YOSHIO , UCHIKURA MASAKI , ONO HIDEKI , MIYAHARA AYAAKI , SAEKI HIDEKI
IPC: G03F1/00 , H01L21/027 , H01L21/30
Abstract: PURPOSE:To easily peel a plastic pellicle with no defects and a good yield without passing a complicated process by temporarily cooling the pellicle formed on a substrate at
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公开(公告)号：JPH02134634A
公开(公告)日：1990-05-23
申请号：JP28675088
申请日：1988-11-15
Applicant: TOSOH CORP
Inventor： HYODO MASAYUKI , UCHIKURA MASAKI , ONO HIDEKI , HASEBE YOSHIO
IPC: G02B27/00 , B29C41/12 , G03F1/62 , H01L21/027
Abstract: PURPOSE:To prepare a pellicle film serving as protective and dust preventing film which is delaminated easily without troublesome processes nor without generating defects in the film by forming the pellicle film on a smooth base material having Cr or Cr alloy on the surface and stripping off the film thereafter. CONSTITUTION:A pellicle film is formed on a base material having Cr or Cr alloy at least on the surface, with a purpose for protection and dust prevention of surface of a base plate of a photomask or reticle to be used for the prepn. of a semiconductor IC, with a fixed distance from the surface of the base plate. The pellicle film is stripped off after it has been formed on a smooth base plate having Cr or Cr alloy on at least the surface of the base plate. Thus, the stripping is performed easily, and a pellicle film can be produced without generating defects such as elongation, wrinkles, scratches, or breakage etc., are all.
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公开(公告)号：JPH01118537A
公开(公告)日：1989-05-11
申请号：JP27573387
申请日：1987-11-02
Applicant: TOSOH CORP
Inventor： NAGASAWA YUJI , KIYOTA TORU , HASEBE YOSHIO
Abstract: PURPOSE:To obtain the title exchange membrane having excellent durability, acid resistance, heat resistance, solvent resistance and high current efficiency, by treating an anion exchange membrane having a specified structure with an alkali metal hydroxide. CONSTITUTION:A film is prepd. from a copolymer of formula V (wherein X is F or CF3; l is 0-5; m is 0 or 1; n is 1-5; r is 2 or 3; p/q=2-16) obtd. by copolymerizing CF2=CF2 and a comonomer of formula I-IV in the presence of a free radical initiator at 0-200 deg.C under a pressure of 1-200atm. Then, this film is reacted with an amine of formula VI or VII (wherein b is r; R2-3 are each 1-5C alkyl) in a solvent at room temp.-80 deg.C for max. about 60hr, if necessary, treated with an alkali metal hydroxide and reacted with an alkylating agent (e.g., CH3I) to obtain an anion exchange membrane of formula VIII [wherein Z is halogen; R1 is R2; R4 may be -(CH2)b- formed by combining R1 or R3 with R4]. Then, this exchange membrane is treated in an aq. soln. of an alkali metal hydroxide (e.g., NaOH) whose concn. is 0.1-70wt.% at 10-80 deg.C for 1-200hr.
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公开(公告)号：JPS6414248A
公开(公告)日：1989-01-18
申请号：JP16879687
申请日：1987-07-08
Applicant: TOSOH CORP
Inventor： HASEBE YOSHIO , KIYOTA TORU , NAGASAWA YUJI
IPC: C08J5/22
Abstract: PURPOSE:To obtain the title ion exchange membrane having excellent durability to repeated wetting and drying and being suitable for a sensor etc., composed of a membrane of a specified trilaminar structure and comprising a perfluorocarbon polymer. CONSTITUTION:A membrane of a copolymer comprising repeating units of formulas I, II, etc. is prepared. Sulfonamide groups are introduced into both sides of the copolymer membrane by reacting with an amine so that sulfonyl halide groups in the center of the membrane may remain intact, the sulfonyl halide groups in the center are converted into sulfonic groups by hydrolysis, and the sulfonamide groups are further quaternized. In this way, the title non- crosslinked ion exchange membrane which consists of a unitary but trilaminar membrane, having anionic exchange groups in the pendent chains in both sides of the three layers, having cationic exchange groups in the pendent chains in the central layer and in which all of the layers have main chains comprising a perfluorocarbon polymer can be obtained.
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Patent Agency Ranking
公开(公告)号：JPH01246547A
公开(公告)日：1989-10-02
申请号：JP7337788
申请日：1988-03-29
Applicant: TOSOH CORP
Inventor： UCHIKURA MASAKI , ONO HIDEKI , HASEBE YOSHIO
IPC: G03F1/00 , H01L21/027 , H01L21/30
Abstract: PURPOSE:To prevent the adhesion of dust to the pellicle and to obviate the generation of defects by film elongation and impurities by covering the aperture in the lower part of a supporting frame and an adhesive agent surface with a conductive film having specific volumetric resistance and providing small holes for communicating the inside and outside of the pellicle to the conductive film. CONSTITUTION:The aperture in the lower part of the supporting frame and the adhesive agent surface are covered by the conductive film and the small holes for communicating the inside and outside of the pellicle are provided to the conductive film. The conductive film to be used is a high-polymer film having the volumetric resistance ranging 10 -10 OMEGA.cm and is more preferably a high-polymer film having the electrical conductivity ranging 10 -10 OMEGA.cm. The electrification at the time of the handling and transporting of the film and the sticking thereof to the mask is thereby obviated and the contamination by the dust is prevented. In addition, the small holes are provided to the conductive film and, therefore, the defects by the film elongation and impurities are eliminated.
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公开(公告)号：JPH01246546A
公开(公告)日：1989-10-02
申请号：JP7337688
申请日：1988-03-29
Applicant: TOSOH CORP
Inventor： UCHIKURA MASAKI , ONO HIDEKI , HASEBE YOSHIO
IPC: G03F1/00 , H01L21/027 , H01L21/30
Abstract: PURPOSE:To effectively prevent the adhesion of dust to a mask by covering the aperture in the lower part of a supporting frame and an adhesive agent surface with a conductive film having specific volumetric resistance. CONSTITUTION:The aperture in the lower part of the supporting frame and the adhesive agent surface are covered by the conductive film. The conductive film is a high-polymer film having the volumetric resistance ranging 10 -10 OMEGA.cm and is more preferably a high-polymer film having the electrical conductivity ranging 10 -10 OMEGA.cm. The more particularly preferable film as the high-polymer film having such electrical conductivity is the film formed by kneading conductive fillers therein and above all, the film formed by using a carbon black as a filler is inexpensive and is capable of providing the sufficient electrical conductivity. The electrification of the pellicle is thereby minimized and the adhesion of the dust thereon is prevented.
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公开(公告)号：JP2011068858A
公开(公告)日：2011-04-07
申请号：JP2010158701
申请日：2010-07-13
Applicant: Tosoh Corp , 東ソー株式会社
Inventor： HASEBE YOSHIO , UJITA KOJI , KISHI SHIGEMI , IWABE KAZUHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a detergent composition for satisfying request items such as detergency, drying properties, safety, cost effectiveness and harmfullness.
SOLUTION: The detergent composition contains diethylene glycol diethyl ether and 3-methyl-3-methoxy-1-butanol. In particular, the content of diethylene glycol diethyl ether is 10-90 vol.% and that of 3-methyl-3-methoxy-1-butanol is 90-10 vol.%. The detergent composition exhibits excellent detergency to processing oils stuck to the parts to be used in various industrial fields such as the car industry, the machine industry, the precision instrument industry, the electrical industry and the electronic instrument industry and particularly is suitable for cleaning combined stains of water with dirty oil, particularly, with used water-soluble processing oil. Since the detergent composition has ≥170°C boiling point, the detergent composition hardly volatilizes, is effective in VOC emission control and further has excellent drying properties.
COPYRIGHT: (C)2011,JPO&INPITAbstract translation: 要解决的问题：提供一种用于满足洗涤性，干燥性，安全性，成本效益和易损性等要求的洗涤剂组合物。 溶液：洗涤剂组合物含有二甘醇二乙醚和3-甲基-3-甲氧基-1-丁醇。 特别地，二甘醇二乙醚的含量为10-90体积％，3-甲基-3-甲氧基-1-丁醇的含量为90〜10体积％。 洗涤剂组合物对于汽车工业，机械工业，精密仪器工业，电气工业和电子仪器工业等各种工业领域中使用的部件的加工油表现出优异的去污性，特别适用于清洗组合 用脏油污渍的水，特别是用水溶性加工油。 由于洗涤剂组合物具有≥170℃沸点，所以洗涤剂组合物几乎不挥发，在VOC排放控制中是有效的，并且还具有优异的干燥性能。 版权所有（C）2011，JPO＆INPIT
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公开(公告)号：JPS644627A
公开(公告)日：1989-01-09
申请号：JP15778787
申请日：1987-06-26
Applicant: TOSOH CORP
Inventor： NAGASAWA YUJI , KIYOTA TORU , HASEBE YOSHIO
Abstract: PURPOSE:To prepare an anion-exchange membrane which is useful for various electrolytic diaphragms and excellent in durability and electric current efficiency, by causing a film consisting of a specified polymer to react with a mixture of two different amines, and then, if necessary, with an alkali metal hydroxide, and finally with an alkyl iodide. CONSTITUTION:A mixture of amines B is obtd. by mixing an amine of formula I (where r is 2-5) and an amine of formula II (where r' is r, and R1-2 are 1-5C alkyl groups) in a vol. ratio of 0.5/99.5-30/70 and, if necessary, adding a solvent such as diethyl ether, toluene, etc. thereto. A plain or tubular film A consisting of a polymer having a structure of formula III (where X is F, CF3; l is 0-5; m is 0, 1; n is 1-5; p and q are both integers and p/q=2-16) is caused to react with the component B at room temp. to 80 deg.C and then, if necessary, with an alkali metal hydroxide C at room temp. to 90 deg.C and finally with a 1-5C alkyl iodide D.
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公开(公告)号：JPS63297432A
公开(公告)日：1988-12-05
申请号：JP13135687
申请日：1987-05-29
Applicant: TOSOH CORP
Inventor： NAGASAWA YUJI , KIYOTA TORU , HASEBE YOSHIO
Abstract: PURPOSE:To obtain the titled exchange membrane having excellent alkali resistance and usable as an electrolytic separation membrane, etc. over a long period, by reacting a branched amine to a copolymer of tetrafluoroethylene and a specific comonomer and reacting the reaction product with an alkali metal hydroxide. CONSTITUTION:(A) Tetrafluoroethylene is copolymerized with (B) a comonomer of formula I, etc., at 2-200 deg.C in the presence of e.g. a free radical initiator to obtain a polymer having a structure of formula II (X is F, etc.; l is 0-5; m is 0 or 1; n is 1-5; p and q are positive number). The polymer is formed into a film of preferably 50-500mum thick e.g. by melt molding, reacted with (C) an amine of formula III (r and s are 1-8; R1 is H, etc.; R2 is 1-4C alkyl; R3 and R4 are 1-6C alkyl) and then with (D) an alkali metal hydroxide to obtain the objective exchange membrane.
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