公开(公告)号：WO2008008065A1

公开(公告)日：2008-01-17

申请号：PCT/US2006/027272

申请日：2006-07-13

Applicant: TOUCHDOWN TECHNOLOGIES, INC.

Inventor： LU, Shaoning ,  NIM, Tea ,  MELVIN, Khoo

IPC: G01R31/02

CPC classification number: G01R31/2891 ,  G01R1/07342

Abstract: A novel method and structure for counter-balancing a lateral force exerted by a probe card onto a device under test (“DUT”) is disclosed. Many DUTs (particularly memory devices) are tested in parallel (i.e., many die at a time) and have unequal numbers of contact pads on top vs. bottom and/or right vs. left sides of the die. The probe card used to test the DUT would necessarily have an uneven distribution of probes that match the contact pads and, as a consequence, may exert a net lateral force on the DUT. By manipulating the individual characteristics of the individual probes, a probe card may be constructed that zeroes the lateral force. Characteristics such as the direction and stiffness of the individual probes can be varied to zero the net lateral force.

Abstract translation: 公开了一种用于将探针卡施加到被测设备（“DUT”）上的横向力平衡的新颖方法和结构。 许多DUT（特别是存储器件）被并行测试（即，一次许多裸片）并且在管芯的顶部与底部和/或右侧与左侧之间具有不相等数量的接触焊盘。 用于测试DUT的探针卡必然具有与接触垫相匹配的探头的不均匀分布，并且因此可能在DUT上施加净侧向力。 通过操纵各个探针的各个特性，构造可以使横向力消除的探针卡。 诸如各个探针的方向和刚度的特征可以变化为零的净侧向力。