公开(公告)号：WO2008127333A1

公开(公告)日：2008-10-23

申请号：PCT/US2007/066578

申请日：2007-04-12

Applicant: TOUCHDOWN TECHNOLOGIES, INC

Inventor： MELVIN, Khoo ,  NIM, Tea ,  ZHIYONG, An

IPC: G01R31/02

CPC classification number: G01R1/06727

Abstract: A novel hybrid probe design is presented that comprises a torsion element and a bending element. These elements allow the probe to store the displacement energy as torsion or as bending. The novel hybrid probe comprises a probe base, a torsion element, a bending element, and a probe tip. The probe elastically deforms to absorb the displacement energy as the probe tip contacts the DUT contact pad. The bending element absorbs some of the displacement energy through bending. Because the torsion element and the bending element join at an angle, a portion of the displacement energy is transferred to the torsion element causing it to twist (torque). The torsion element can also bend to accommodate the storage of energy through torsion and bending. Also, adjusting the position of a pivot can be manipulated to alter the energy absorption characteristics of the probe.

Abstract translation: 提出了一种新颖的混合探针设计，其包括扭转元件和弯曲元件。 这些元件允许探头将位移能量存储为扭转或弯曲。 该新型混合探针包括探针基座，扭转元件，弯曲元件和探针尖端。 当探针尖端接触DUT接触垫时，探头弹性变形以吸收位移能量。 弯曲元件通过弯曲吸收一些位移能量。 由于扭转元件和弯曲元件以一定角度接合，所以位移能量的一部分被传递到扭转元件，使其扭转（扭矩）。 扭转元件还可以弯曲以适应通过扭转和弯曲的能量存储。 此外，可以调节枢轴的位置以改变探头的能量吸收特性。

公开(公告)号：WO2008008065A1

公开(公告)日：2008-01-17

申请号：PCT/US2006/027272

申请日：2006-07-13

Applicant: TOUCHDOWN TECHNOLOGIES, INC.

Inventor： LU, Shaoning ,  NIM, Tea ,  MELVIN, Khoo

IPC: G01R31/02

CPC classification number: G01R31/2891 ,  G01R1/07342

Abstract: A novel method and structure for counter-balancing a lateral force exerted by a probe card onto a device under test (“DUT”) is disclosed. Many DUTs (particularly memory devices) are tested in parallel (i.e., many die at a time) and have unequal numbers of contact pads on top vs. bottom and/or right vs. left sides of the die. The probe card used to test the DUT would necessarily have an uneven distribution of probes that match the contact pads and, as a consequence, may exert a net lateral force on the DUT. By manipulating the individual characteristics of the individual probes, a probe card may be constructed that zeroes the lateral force. Characteristics such as the direction and stiffness of the individual probes can be varied to zero the net lateral force.

Abstract translation: 公开了一种用于将探针卡施加到被测设备（“DUT”）上的横向力平衡的新颖方法和结构。 许多DUT（特别是存储器件）被并行测试（即，一次许多裸片）并且在管芯的顶部与底部和/或右侧与左侧之间具有不相等数量的接触焊盘。 用于测试DUT的探针卡必然具有与接触垫相匹配的探头的不均匀分布，并且因此可能在DUT上施加净侧向力。 通过操纵各个探针的各个特性，构造可以使横向力消除的探针卡。 诸如各个探针的方向和刚度的特征可以变化为零的净侧向力。