公开(公告)号：WO2007102834A3

公开(公告)日：2008-01-03

申请号：PCT/US2006021701

申请日：2006-06-06

Applicant: TOUCHDOWN TECHNOLOGIES INC

Inventor： WALKER STEVEN J

IPC: G01R31/02 ,  G06K9/00 ,  H04N7/18

CPC classification number: G01R31/2891 ,  G01R1/06794 ,  G01R1/07342

Abstract: A novel probe card that comprises a set of fiducials (10, IS, 2025 and 60) and a method for using the same are disclosed The set o fiducials (10, 15, 20, 25 and 60) comppses a first fiducial (10, 15, 20 and 25) and a second fiducial (60) fixed relative to the probe substrate (5) Comparing the relative positions of the fiducials (10, 15, 20, 25 and 60) determines whether the probes (20) are in pr alignment This can be performed by the unaided eye or by using a low powered microscope (165) This novel probe card may also used with computer vision alignment methods, thus enhancing the speed and accuracy of the computer vision method.

Abstract translation: 公开了一种包括一组基准（10，IS，2025和60）的新型探针卡及其使用方法，所述基准（10,15,20,25和60）包含第一基准（10， 相对于探针基板（5）固定的第二基准（60）。比较基准（10,15,20,25和60）的相对位置确定探针（20）是否处于pr 对准这可以通过肉眼或使用低功率显微镜进行（165）这种新型探针卡也可以与计算机视觉对准方法一起使用，从而提高计算机视觉方法的速度和准确性。

公开(公告)号：WO2007102847A3

公开(公告)日：2008-01-17

申请号：PCT/US2006037771

申请日：2006-09-26

Applicant: TOUCHDOWN TECHNOLOGIES INC

Inventor： WALKER STEVEN J

IPC: G01R31/02

CPC classification number: G01R31/2891 ,  G01R1/06794 ,  G01R1/07342

Abstract: A novel structure for a probe card that comprises a deformable metal or other deformable material for detecting excess overdrive and a method for using the same are disclosed. This detection structure may be positioned on the substrate along the bending path of the probe, such that should the probe experience excess overdrive, then the detection structure will permanently deform where it is hit by any portion of the probe. Alternatively, the detection structure may be embedded in the substrate, and may also function as a fiducial for alignment detection. Inspection of the probe card, and specifically the detection structure, will reveal whether any probe has experienced excess overdrive. Should the inspection reveal that certain regions of the card experienced excess overdrive, this may indicate a planarity problem that affects production line yield.

Abstract translation: 公开了一种用于探针卡的新型结构，其包括用于检测过量过载的可变形金属或其它可变形材料及其使用方法。 该检测结构可以沿着探针的弯曲路径定位在基底上，使得如果探针经受多余的过度传播，则检测结构将在被探针的任何部分撞击的地方永久地变形。 或者，检测结构可以嵌入在基板中，并且还可以用作对准检测的基准。 探针卡的检查，特别是检测结构，将揭示任何探头是否经历过度过载。 如果检查显示卡的某些区域经历过多的过度驱动，这可能表示影响生产线产量的平面问题。