公开(公告)号：GB2196175B

公开(公告)日：1990-10-17

申请号：GB8623842

申请日：1986-10-03

Applicant: TRIALSITE LTD ,  SIMON CHRITOPHER JOHN GARTH

Inventor： GARTH SIMON CHRISTOPHER JOHN

IPC: H01L21/66 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q90/00 ,  G01R31/302 ,  G21K5/04 ,  H01J37/04 ,  H01J37/06 ,  H01J37/26 ,  H01J37/28

Abstract: Apparatus for producing a pulsed electron beam, particularly adapted for inspecting integrated circuits, includes a beam scanner (10) for causing a continuous electron beam to scan a circle, which beam may emerge from the second of three electrostatic lenses of an electron beam microscope. The beam then passes a deflecting means (12) on the circle for deflecting the beam in a radial direction at selected locations, before being collected by means (14) for collecting the electron pulses from alternate locations to provide a pulsed electron beam.

公开(公告)号：GB2196175A

公开(公告)日：1988-04-20

申请号：GB8623842

申请日：1986-10-03

Applicant: TRIALSITE LTD

Inventor： GARTH SIMON CHRISTOPHER JOHN

IPC: H01L21/66 ,  G01Q10/02 ,  G01Q30/02 ,  G01Q90/00 ,  G01R31/302 ,  G21K5/04 ,  H01J37/04 ,  H01J37/06 ,  H01J37/26 ,  H01J37/28 ,  H01J3/00 ,  H01J3/08 ,  H01J3/26 ,  H01J37/147

Abstract: Apparatus for producing a pulsed electron beam, particularly adapted for inspecting integrated circuits, includes a beam scanner (10) for causing a continuous electron beam to scan a circle, which beam may emerge from the second of three electrostatic lenses of an electron beam microscope. The beam then passes a deflecting means (12) on the circle for deflecting the beam in a radial direction at selected locations, before being collected by means (14) for collecting the electron pulses from alternate locations to provide a pulsed electron beam.